MODE TRANSITIONS IN LOW-PRESSURE NITROGEN RF-CCP AT DIFFERENT FREQUENCIES

2015-01-01
Erözbek Güngör, Ümmügül
Bilikmen, Sinan Kadri
Citation Formats
Ü. Erözbek Güngör and S. K. Bilikmen, “MODE TRANSITIONS IN LOW-PRESSURE NITROGEN RF-CCP AT DIFFERENT FREQUENCIES,” 2015, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/53196.