Critical analysis of matching schemes in capacitively coupled discharges

2003-10-01
Demokan, O
It is shown that, in capacitively coupled radio frequency discharges, the amplitude of the discharge current may not have a unique value for a matching network designed to yield the maximum power transfer. The condition, which may lead to this uncertainty, is derived to avoid the possible, undesired mode of operation.

Citation Formats
O. Demokan, “Critical analysis of matching schemes in capacitively coupled discharges,” IEEE TRANSACTIONS ON PLASMA SCIENCE, vol. 31, no. 5, pp. 1100–1102, 2003, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/63824.