Critical analysis of matching schemes in capacitively coupled discharges

Date

2003-10-01

Author

Demokan, O

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It is shown that, in capacitively coupled radio frequency discharges, the amplitude of the discharge current may not have a unique value for a matching network designed to yield the maximum power transfer. The condition, which may lead to this uncertainty, is derived to avoid the possible, undesired mode of operation.

Subject Keywords

Nuclear and High Energy Physics, Condensed Matter Physics

URI

https://hdl.handle.net/11511/63824

Journal

IEEE TRANSACTIONS ON PLASMA SCIENCE

DOI

https://doi.org/10.1109/tps.2003.815480

Collections

Department of Physics, Article

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Citation Formats

O. Demokan, “Critical analysis of matching schemes in capacitively coupled discharges,” IEEE TRANSACTIONS ON PLASMA SCIENCE, pp. 1100–1102, 2003, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/63824.