Critical analysis of matching schemes in capacitively coupled discharges

Demokan, O
It is shown that, in capacitively coupled radio frequency discharges, the amplitude of the discharge current may not have a unique value for a matching network designed to yield the maximum power transfer. The condition, which may lead to this uncertainty, is derived to avoid the possible, undesired mode of operation.


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The optoelectronic and electrical properties of TIGaS2 single crystals have been investigated by means of room temperature transmittance and reflectance spectral analysis, Hall coefficient, dark electrical resistivity and photocurrent measurements in the temperature range of 200-350 K. The optical data have revealed an indirect and direct allowed transition band gaps of 2.45 and 2.51 eV, an oscillator and dispersion energy of 5.04 and 26.45 eV, respectively, a static dielectric constant of 6.25 and static r...
Citation Formats
O. Demokan, “Critical analysis of matching schemes in capacitively coupled discharges,” IEEE TRANSACTIONS ON PLASMA SCIENCE, pp. 1100–1102, 2003, Accessed: 00, 2020. [Online]. Available: