Ion-matrix sheaths related to planar targets with semicylindrical grooves

Date

2003-01-01

Author

Demokan, O
Filiz, Y

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

176
views

0
downloads

In this work, the ion-matrix sheaths near planar targets with infinitely long, semicylindrical grooves are studied analytically to optimize ion implantation, concerning a broad range of industrial products. The potential profiles inside and outside the groove are derived and the velocity components inside the groove are estimated. The variation of the angle of incidence on the surface of the groove and the constant potential contours outside the groove are obtained. Results are observed to be in good agreement with the numerical simulations. Finally, suggestions for improving the uniformity of implantation on the surfaces of such grooves are stated. (C) 2003 American Institute of Physics.

Subject Keywords

General Physics and Astronomy

URI

https://hdl.handle.net/11511/64612

Journal

JOURNAL OF APPLIED PHYSICS

DOI

https://doi.org/10.1063/1.1525858

Collections

Department of Physics, Article

Suggestions

OpenMETU
Core

Singularities of spectra of infrared reflection of tertiary compounds of the type T1BX2 Hasanlı, Nızamı; Khomutova, M.D.; Sardarly, R.M.; Tagorov, V.I. (Springer Science and Business Media LLC, 1977-07-01) The frequencies of lattice vibrations are calculated for compounds of the type T1BX2 on the basis of the linear-chain model. The calculated frequencies are compared with experimental values for TlGaS2 and TlGaSe2. The good agreement between the calculated and experimental frequencies serves as proof of the applicability of the linear-chain model to compounds of the T1BX2 type. The proposed method of calculation of frequencies makes it possible to predict the theoretical frequencies of lattice vibrations of ...
Atomic chains and lattice vibration characteristics in A2IIIB3VI compounds with tetrahedral coordination of atoms Hasanlı, Nızamı; Khomutova, M.D. (Springer Science and Business Media LLC, 1977-04-01) On the basis of the presence of atomic chains in A2 IIIB3 VI compounds having zincblende defect structure, a linear-chain model is used to calculate the lattice vibration frequencies. The agreement of the calculated and experimental frequencies is an indication of the applicability of the model and enables one to determine the motion of various atoms during the corresponding vibrations.
Defect-controlled transport properties of metallic atoms along carbon nanotube surfaces Barinov, Alexei; Toffoli, Hande; Fabris, Stefano; Gregoratti, Luca; Aballe, Lucia; Dudin, Pavel; Baroni, Stefano; Kiskinova, Maya (American Physical Society (APS), 2007-07-01) The diffusion mechanism of indium atoms along multiwalled carbon nanotubes is studied by means of photoemission spectromicroscopy and density functional theory calculations. The unusually high activation temperature for diffusion (approximate to 700 K), the complex C 1s and In 3d(5/2) spectra, and the calculated adsorption energies and diffusion barriers suggest that the indium transport is controlled by the concentration of defects in the C network and proceeds via hopping of indium adatoms between C vacan...
Progressive structural and electronic properties of nano-structured carbon atomic chains Usanmaz, D.; Srivastava, G. P. (AIP Publishing, 2013-05-21) Ab initio calculations, based on the planewave pseudopotential method and the density functional theory, have been reported on the changes in the electronic and structural properties of short carbon atomic chains held rigidly between hydrogenated thin armchair graphene nanoribbons (N-a-AGNR) of dimer line numbers N-a = 4 and 5. We have considered chains of several lengths (n = 4-9 atoms) and with different forms of attachment with the AGNRs. It is found that odd-numbered chains are metallic in nature, with ...
Ion-matrix sheaths inside cylindrical bores with small radii and longitudinal grooves Demokan, O (Institute of Electrical and Electronics Engineers (IEEE), 2004-02-01) In this paper, ion-matrix sheaths inside infinitely long cylindrical bores with longitudinal grooves are studied analytically to optimize ion implantation, concerning a broad range of industrial products. The radius of the cylindrical target is assumed to be less than the sheath length to simulate realistic targets, such as barrels and muzzles. The potential profiles inside and outside the grooves are derived and the ion velocity components inside the grooves are estimated. Finally, suggestions for improvin...

Citation Formats

O. Demokan and Y. Filiz, “Ion-matrix sheaths related to planar targets with semicylindrical grooves,” JOURNAL OF APPLIED PHYSICS, pp. 83–87, 2003, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/64612.