Ion-matrix sheaths related to planar targets with semicylindrical grooves

Date

2003-01-01

Author

Demokan, O
Filiz, Y

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In this work, the ion-matrix sheaths near planar targets with infinitely long, semicylindrical grooves are studied analytically to optimize ion implantation, concerning a broad range of industrial products. The potential profiles inside and outside the groove are derived and the velocity components inside the groove are estimated. The variation of the angle of incidence on the surface of the groove and the constant potential contours outside the groove are obtained. Results are observed to be in good agreement with the numerical simulations. Finally, suggestions for improving the uniformity of implantation on the surfaces of such grooves are stated. (C) 2003 American Institute of Physics.

Subject Keywords

General Physics and Astronomy

URI

https://hdl.handle.net/11511/64612

Journal

JOURNAL OF APPLIED PHYSICS

DOI

https://doi.org/10.1063/1.1525858

Collections

Department of Physics, Article

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Citation Formats

O. Demokan and Y. Filiz, “Ion-matrix sheaths related to planar targets with semicylindrical grooves,” JOURNAL OF APPLIED PHYSICS, pp. 83–87, 2003, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/64612.