Glow discharge with diminishing neutral plasma

Date

2002-10-15

Author

Demokan, O
Akman, S

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In this work, the anode-cathode distance in a direct current glow discharge is reduced manually to values smaller than the Child-Langmuir extent, while the discharge current, the discharge voltage and the Langmuir probe current are monitored continuously. The discharge current is observed to develop a large peak as soon as the sheath edge contacts with the anode, then decays to negligible values for a certain time interval, after which, this cycle starts repeating itself periodically. A model is described to interpret the behavior of all three quantities self-consistently. The experiment is performed with different anode-cathode distances and the implications of the observations regarding ion implantation processes are discussed. (C) 2002 American Institute of Physics.

Subject Keywords

Source ion-implantation

URI

https://hdl.handle.net/11511/65971

Journal

JOURNAL OF APPLIED PHYSICS

DOI

https://doi.org/10.1063/1.1486056

Collections

Department of Physics, Article

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Citation Formats

O. Demokan and S. Akman, “Glow discharge with diminishing neutral plasma,” JOURNAL OF APPLIED PHYSICS, pp. 4245–4248, 2002, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/65971.