Conversion Efficiency Calculations for Soft X-Rays Emitted from Tin Plasma for Lithography Applications

Date

2008-08-22

Author

Demir, P.
Demir, P.
KAÇAR, ELİF
Bilikmen, S. K.
DEMİR, ALİ

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

104
views

0
downloads

Laser-produced plasmas can be used as extreme ultraviolet (EUV) sources for lithography, operating in the 13.5 nm range. Soft X-rays emitted from laser-produced tin plasma were simulated using the EHYBRID code. Required atomic data for tin ions were calculated using the Cowan code. In the EHYBRID simulations tin stab target is assumed to be irradiated by 1064 nm wavelength Nd:YAG laser. Simulations were performed for different driving laser parameters.

Subject Keywords

Model

URI

https://hdl.handle.net/11511/67896

Collections

Department of Physics, Conference / Seminar

Suggestions

OpenMETU
Core

Characterization and fabrication of silicon thin films for solar cell applications Karaman, Mehmet; Turan, Raşit; Ünalan, Hüsnü Emrah; Department of Eurasian Studies (2011) In this thesis study, fabrication and characterization of silicon thin films prepared by magnetron sputtering and electron beam evaporation for solar cell applications have been investigated. In the first part of the study, magnetron sputtering method was used to fabricate thin hydrogenated amorphous silicon (a-Si:H) film on a Si substrate. Some samples were prepared on glass substrate for the basic characterizations like transmission and resistivity. Dark and illuminated I-V characteristics of the silicon ...
Near-infrared emission spectrometry measurements for nonintrusive soot diagnostics in flames Ayranci, Isil; Vaillon, Rodolphe; Selçuk, Nevin (2008-01-01) The present study focuses on measurement of line-of-sight emission intensity spectra in the near-infrared range by Fourier-transform infrared spectrometry for use in tomographic soot diagnostics. Measurements are carried out on an axisymmetric, laboratory grade, ethylene/air diffusion flame within the 1.1-1.7 mu m (9000-6000 cm(-1)) spectral range. Presentation of the measurement and calibration methodology is followed by the description of noise and uncertainty assessment procedures. A novel noise characte...
Dual-band high-frequency metamaterial absorber based on patch resonator for solar cell applications and its enhancement with graphene layers Ustunsoy, Mehmet Pasa; Sabah, Cumali (2016-12-05) In this paper, a dual-band high-frequency metamaterial absorber based on patch resonator is designed and analyzed for solar cells. In order to obtain a metamaterial absorber, metal-semiconductor-metal layers are combined. The results of the designed structure are shown in the infrared and visible ranges of solar spectrum. Structural parameters and dimensions of the device have a significant importance on the performance of the designed absorber. The simulations are carried out with full-wave electromagnetic...
Pumping chamber design in diode pumped solid-state lasers for maximum system efficiency and minimum optical distortion Zengin, Kubilay; Sayan, Gönül; Yelen, Kuthan; Department of Electrical and Electronics Engineering (2013) The beam quality and the system efficiency of a diode-pumped solid-state laser source are directly related to the thermal profile inside the laser crystal. The thermal profile in a laser crystal should be made uniform in order to reduce the negative effects of the thermal lens. However, the absorbed pump profile that forms a uniform thermal profile inside the gain medium may adversely affect the system efficiency. In this thesis, a computational and empirical method was developed for designing pumping chamb...
Nanosecond pulsed infrared laser induced crystallization of amorphous silicon films for potential photovoltaic applications Çınar, Kamil; Bek, Alpan; Department of Physics (2018) Laser processing applied to thin film silicon is a practical tool for fabrication of thin film transistors and solar cells. Application of laser processing technologies to silicon based photovoltaics has been on the rise. Two examples out of plenty are: crystallization of amorphous Si (a-Si) thin films to produce polycrystalline Si (poly-Si) thin films; and quality improvement of poly-Si structures on the silicon wafer surface by laser annealing. Parameters for optimal crystalline silicon fabrication depend...

Citation Formats

P. Demir, P. Demir, E. KAÇAR, S. K. Bilikmen, and A. DEMİR, “Conversion Efficiency Calculations for Soft X-Rays Emitted from Tin Plasma for Lithography Applications,” 2008, vol. 130, p. 281, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/67896.