Elektrostatik MEMS rezonatörlerde kalite faktörünü yükselten ve kaçak akımını düşüren ikinci harmonik okumaya dayalı bir karakterizasyon/sürüş yöntemi

Date

2019

Author

Külah, Haluk
Kangül, Mustafa
Aydın, Eren
Furkan, Gökçe

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Başvuru konusu buluş, elektrostatik sürülen değişken boşluklu rezonatörler için yüksek kalite faktörlü ve kaçak akım etkilerinden arındırılmış yeni bir karakterizasyon yöntemi ile ilgilidir.

URI

https://hdl.handle.net/11511/70079

Collections

Department of Electrical and Electronics Engineering, Patent / Utility Model

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Citation Formats

H. Külah, M. Kangül, E. Aydın, and G. Furkan, “Elektrostatik MEMS rezonatörlerde kalite faktörünü yükselten ve kaçak akımını düşüren ikinci harmonik okumaya dayalı bir karakterizasyon/sürüş yöntemi,” 00, 2019.