A Symmetrical and Decoupled Microgyroscope with Electroforming Process on Insulating Substrate

2002-09-18
Akın, Tayfun
Alper, Said Emre
Citation Formats
T. Akın and S. E. Alper, “A Symmetrical and Decoupled Microgyroscope with Electroforming Process on Insulating Substrate,” 2002, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/72185.