A Symmetrical and Decoupled Microgyroscope with Electroforming Process on Insulating Substrate

2002-09-18

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Citation Formats
T. Akın, “A Symmetrical and Decoupled Microgyroscope with Electroforming Process on Insulating Substrate,” 2002, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/72185.