MEMS Malzeme Karakterizasyonu için Bütünlesik bir Elektrostatik Mikro Bükülme Test Yapısı Tasarımı ve Gerçeklestirilmesi

Date

2012-02-01

Author

Yıldırım, Ender
Akın, Tayfun
Arıkan, Mehmet Ali Sahir

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URI

http://cujse.cankaya.edu.tr/archive/9_1/02_cujse_11024.pdf
https://hdl.handle.net/11511/84977

Journal

Cankaya University Journal of Science and Engineering

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Unverified, Article

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MEMS Malzeme Karakterizasyonu için Bütünleşik bir Elektrostatik Mikro Bükülme Test Yapısı Tasarımı ve Gerçekleştirilmesi Yıldırım, Ender; Arıkan, Mehmet Ali Sahir; Akın, Tayfun (2012-01-01)
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Citation Formats

E. Yıldırım, T. Akın, and M. A. S. Arıkan, “MEMS Malzeme Karakterizasyonu için Bütünlesik bir Elektrostatik Mikro Bükülme Test Yapısı Tasarımı ve Gerçeklestirilmesi,” Cankaya University Journal of Science and Engineering, pp. 9–23, 2012, Accessed: 00, 2021. [Online]. Available: http://cujse.cankaya.edu.tr/archive/9_1/02_cujse_11024.pdf.