Sub-micron Direct Silicon Processing by Microsphere Focused Femtosecond Infrared Laser

Date

2021-01-01

Author

İdikut, Fırat
Karagöz, Burcu
Bek, Alpan

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This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

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https://www.sensorsportal.com/HTML/BOOKSTORE/Advances_in_Optics_Vol_5.pdf
https://hdl.handle.net/11511/95364

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Advances in Optics: Reviews Book Series, Volume 5

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Department of Physics, Book / Book chapter

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Citation Formats

F. İdikut, B. Karagöz, and A. Bek, Sub-micron Direct Silicon Processing by Microsphere Focused Femtosecond Infrared Laser. 2021.