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Sub-micron Direct Silicon Processing by Microsphere Focused Femtosecond Infrared Laser
Date
2021-01-01
Author
İdikut, Fırat
Karagöz, Burcu
Bek, Alpan
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Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
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https://www.sensorsportal.com/HTML/BOOKSTORE/Advances_in_Optics_Vol_5.pdf
https://hdl.handle.net/11511/95364
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Advances in Optics: Reviews Book Series, Volume 5
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Department of Physics, Book / Book chapter
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F. İdikut, B. Karagöz, and A. Bek,
Sub-micron Direct Silicon Processing by Microsphere Focused Femtosecond Infrared Laser
. 2021.