LIPSS for SERS: Metal Coated Direct Laser Written Periodic Nanostructures for Surface Enhanced Raman Spectroscopy

Erkizan, Serena Nur
İdikut, Fırat
Demirtas, Ozge
Goodarzi, Arian
Demir, Ahmet Kemal
Borra, Mona
Pavlov, Ihor
Bek, Alpan
A novel method of fabricating large-area, low-cost surface-enhanced Raman spectroscopy (SERS) substrates is introduced which yields densely nanostructured surfaces utilizing laser-induced periodic surface structuring (LIPSS) of crystalline silicon (Si). Two different interaction regimes yield low spatial frequency (LSFL) and high spatial frequency (HSFL) LIPSS patterns. Nanostructuring of Si surface is followed by deposition of a thin noble metal layer to complete the fabrication procedure. A 50-70 nm thick Ag layer is shown to maximize the SERS performance. The SERS effect is attributed to the electromagnetic field enhancement originating from the nanoscale surface roughness of Si that can be controlled by LSFL and HSFL nature of the structure. The SERS substrates are found to be capable of detecting a Raman analyte down to 10(-11) m. SERS performance of the Ag deposited substrates at 532, 660, and 785 nm excitation wavelengths is compared. Both LSFL and HSFL Si surfaces with 70 nm thick Ag are found to exhibit the strongest SERS under 660 nm excitation exhibiting Raman enhancement factors (EFs) as high as 10(9). The Raman EFs are calculated both by SERS spectra experimentally, and using finite-elements method simulation of the electric field enhancement where a good agreement is found.


Akbıyık, Alp; Bek, Alpan; Department of Physics (2022-6-10)
In this thesis, Surface-Enhanced Raman Spectroscopy (SERS) substrates are fabricated using laser assisted chemical etching of silicon as a surface nanostructuring technique. As a novel method of control over the structuring parameters, the incident laser illumination is spatially modified via a Digital Micromirror Device (DMD) that enable fast and uniform fabrication of complex structures. Onto the photochemically nanostructured silicon surfaces, silver and gold films are deposited by thermal evaporation or...
Laser induced periodic surface structuring for surface enhanced raman spectroscopy
Özkarslıgil, Zeynep Tuğçe; Bek, Alpan; Department of Physics (2020)
In this study, our aim is to fabricate and characterize efficient substrates of surface enhanced Raman spectroscopy (SERS) utilizing the field enhancement due to hot spots made by recently developed method of laser induced periodic surface structuring (LIPSS). LIPSS is a cost-effective technique for rapid processing of almost any materials compared to conventional lithography methods. Coating of a thin silver film on LIPSS applied substrate surface provides to observe the localized surface plasmon effect fo...
E-Beam lithography designed substrates for surface enhanced Raman spectroscopy
CİNEL, NEVAL AYŞEGÜL; Cakmakyapan, Semih; Butun, Serkan; Ertaş, Gülay; ÖZBAY, Ekmel (2015-06-01)
Surface Enhanced Raman Spectroscopy (SERS) is a popular method that amplifies weak Raman signals from Raman-active analyte molecules making use of certain specially-prepared metallic surfaces. The main challenge in SERS is to design and fabricate highly repeatable, predictable, and sensitive substrates. There are many fabrication methods that strive to achieve this goal, which are briefly summarized in this paper. The E-beam lithography method is proposed to be superior to the mentioned techniques. In this ...
"Fairy Chimney'-Shaped Tandem Metamaterials as Double Resonance SERS Substrates
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A highly tunable design for obtaining double resonance substrates to be used in surface-enhanced Raman spectroscopy is proposed. Tandem truncated nanocones composed of Au-SiO2-Au layers are designed, simulated and fabricated to obtain resonances at laser excitation and Stokes frequencies. Surface-enhanced Raman scattering experiments are conducted to compare the enhancements obtained from double resonance substrates to those obtained from single resonance gold truncated nanocones. The best enhancement facto...
Stepped-etching for preserving critical dimensions in through-wafer deep reactive ion etching of thick silicon
Alper, Said Emre; Aydemir, A.; Akın, Tayfun (2009-06-25)
This paper presents the experimental investigation of stepped deep reactive ion etching (DRIE) process in order to minimize critical-dimension (CD) variations due to local heating observed in through-wafer etch of 100 mum-thick, high aspect ratio silicon microstructures that are suspended over glass substrate. Classical methods of cooling the substrate, using a heat-sink layer, or increasing the thickness of sidewall passivation in general turns out to be insufficient for preventing excessive damage in crit...
Citation Formats
S. N. Erkizan et al., “LIPSS for SERS: Metal Coated Direct Laser Written Periodic Nanostructures for Surface Enhanced Raman Spectroscopy,” ADVANCED OPTICAL MATERIALS, pp. 0–0, 2022, Accessed: 00, 2022. [Online]. Available: