Show/Hide Menu
Hide/Show Apps
Logout
Türkçe
Türkçe
Search
Search
Login
Login
OpenMETU
OpenMETU
About
About
Open Science Policy
Open Science Policy
Open Access Guideline
Open Access Guideline
Postgraduate Thesis Guideline
Postgraduate Thesis Guideline
Communities & Collections
Communities & Collections
Help
Help
Frequently Asked Questions
Frequently Asked Questions
Guides
Guides
Thesis submission
Thesis submission
MS without thesis term project submission
MS without thesis term project submission
Publication submission with DOI
Publication submission with DOI
Publication submission
Publication submission
Supporting Information
Supporting Information
General Information
General Information
Copyright, Embargo and License
Copyright, Embargo and License
Contact us
Contact us
Modeling of helically applied current to the inductively coupled radio frequency plasma torch in two dimensions
Download
index.pdf
Date
2004
Author
Cantürk, Mehmet
Metadata
Show full item record
Item Usage Stats
171
views
103
downloads
Cite This
The electrodeless plasma discharge is typically driven by radio frequency (RF) power supply within the range (0.2 Ł 40 MHz). The applied power is coupled into the plasma inductively called inductively coupled plasma (ICP). RF ICP technique has achieved significance importance in a diversity of research and industrial applications for over the last threes decades. It is still required to undertake both theoretical and experimental research. In this work, RF ICP technique is applied on the torch modeling in 2D. Based on extended electromagnetic vector potential representation, an axisymmetric model in 2D is proposed for the calculations of the electromagnetic fields in an RF ICP torch. The influence of axial vector potential is included to the vector potential formulations. This is achieved by imposing a helical current carrying wire configuration. The corresponding governing equations are solved numerically by applying finite element method (FEM) using commercial partial differential equation solver (Flex PDE3). Based on this model, the plasma behavior and properties are examined in terms of plasma parameters. Besides, a comparative iii analysis is made between proposed model called helical configuration and the one currently available in the literature called circular configuration. This study shows relatively little difference between temperature fields predicted by two models. However, significant difference is observed between corresponding flows and electromagnetic fields. Especially, tangential flow which is observed in helical configuration vanishes in circular configuration. The proposed model offers an effective means of accounting for the variations of the helical coil geometry on the flow and temperature fields and achieving a better representation of the electromagnetic fields in the discharge. Finally, it is concluded that minimum number of turns (n = 2)
Subject Keywords
Radio frequency.
URI
http://etd.lib.metu.edu.tr/upload/3/12604691/index.pdf
https://hdl.handle.net/11511/14006
Collections
Graduate School of Natural and Applied Sciences, Thesis
Suggestions
OpenMETU
Core
Cantilever type radio frequency microelectromechanical systems shunt capacitive switch design and fabrication
Demirel, Kaan; Yazgan, Erdem; Demir, Şimşek; Akın, Tayfun (SPIE-Intl Soc Optical Eng, 2015-9-21)
A new cantilever type radio frequency microelectromechanical systems (RF MEMS) shunt capacitive switch design and fabrication is presented. The mechanical, electromechanical, and electromagnetic designs are carried out to get <40 V actuation voltage, high isolation, and low insertion loss for 24 and 35 GHz and the fabrication is carried out for 24 GHz RF MEMS switch. The fabricated switch shows lower than 0.35 dB insertion loss up to 40 GHz and greater than 20 dB isolation at 22 to 29 GHz frequency band. An...
Design of an X-band 3-bit RF MEMS constant phase shifter
Kuzubaşlı, Ahmet; Akın, Tayfun; Demir, Şimşek; Department of Electrical and Electronics Engineering (2016)
This thesis presents a 3-bit 180° constant phase shifter design implementing Co-Planar Waveguide (CPW) and RF MEMS variable capacitors with ±1.8% accuracy at 10 GHz and ±5.8% maximum peak error between 9-11 GHz. The phase shifter with minimum phase errors is determined by considering exemplary circuit simulations of different phase shifter types designed with a novel in-house RF MEMS fabrication process [1] parameters. Due to its wide-band characteristics and CPW compatibility, the selected topology is the ...
Critical analysis of matching schemes in capacitively coupled discharges
Demokan, O (Institute of Electrical and Electronics Engineers (IEEE), 2003-10-01)
It is shown that, in capacitively coupled radio frequency discharges, the amplitude of the discharge current may not have a unique value for a matching network designed to yield the maximum power transfer. The condition, which may lead to this uncertainty, is derived to avoid the possible, undesired mode of operation.
A conceptual evaluation of frequency diverse arrays and novel utilization of LFMCW
Eker, Taylan; Demir, Şimşek; Department of Electrical and Electronics Engineering (2011)
Phased array based systems have extending applications in electronic warfare, radio astronomy, civilian applications with technological advancements. The main virtue offered by these systems is the creation of agile beams with utilization of phase shifting or delay elements. In fact, the desire for flexible steering comes with a cost. Frequency Diverse Array (FDA) concept is another approach to beam steering problem. In this context, the subsequent antenna elements are fed with stepped discrete frequencies ...
Prospects of FMCW-based frequency diverse array radar
Cetiner, Ramazan; Cetintepe, Cagri; Demir, Şimşek; Hizal, Altunkan (2019-11-01)
The linear frequency modulated (LFM) frequency modulated continuous wave (FMCW)-based frequency diverse array (FDA) radar concept is investigated in detail. The radar operates as a linear pulsed FMCW/FDA in the transmission (TX) mode while it operates as a pulsed FMCW/phased array (PA) in the receiving mode. The issues such as low signal-to-noise ratio (SNR) of FDA, the time-angle scanning and time-range ambiguities are studied. It is shown that the local instantaneous frequency bandwidth is much smaller th...
Citation Formats
IEEE
ACM
APA
CHICAGO
MLA
BibTeX
M. Cantürk, “Modeling of helically applied current to the inductively coupled radio frequency plasma torch in two dimensions,” Ph.D. - Doctoral Program, Middle East Technical University, 2004.