Resonance-based MEMS temperature sensors for temperature compensation of mems capacitive accelerometer

Download
2016
Demirhan, Gülşah
The idea of the proposed study is using the resonator structure as a temperature sensor together with controller circuitry. That is to say, the study consists of two branches; one is PI controller output which would be used as a temperature sensor and the other is preamplifier output which would be used as carrier generator to the accelerometer readout circuitry. The proposed resonator is analyzed in detail in terms of dynamics, simulation models and theoretical investigations. The implemented resonator is shown to satisfy the estimated performance parameters with measurements conducted using various test setups. The functionality of concept is verified with additional tests. In other words, it is gathered repeatable temperature sensitivity data from both the accelerometer and the resonating temperature sensor. Then, initially the temperature sensitivity of the accelerometer output with the controller output of the resonating accelerometer is compensated. Once the attempt in the first step is succeed, the temperature compensation network is disassembled and the resonator output to the accelerometer package as the carrier signal is fed. This eliminates the need for an external carrier waveform generated by a standard clock generator, which can be one of the dominant noise sources injected into the accelerometer system. After this new interconnection is made, the temperature sensitivity of the accelerometer is measured. By doing that, it is aimed to observe that the temperature sensitivity of the accelerometer is the same as before compensation, while it is driven by the resonator output as the carrier signal. Finally, the compensation network will be re-assembled while still feeding the accelerometer with the output of the resonator, and it is tried to repeat the compensated accelerometer response that was previously observed at the first step. The best system level test results showed that the temperature sensitivity is improved from -32 mg/°C to -1.6 µg/°C for -35 µg/√Hz noise floor, 16 µg bias instability and 122 dB dynamic range.

Suggestions

Shape optimization of MEMS switches for miniaturization
Ahmed, Imran; Dal, Hüsnü; Ünlü, Mehmet; Department of Mechanical Engineering (2018)
This thesis presents miniature optimized cantilever beam MEMS contact switches for low pull-in voltage, low switching time and relatively high contact force for stable switch operation. Beam based MEMS switches are promising replacements of CMOS based p-i-n diodes and field effect transistor (FET) diode switches due to structural and operation advantages over these solid state switches. High isolation, zero power consumption and very low manufacturing cost are promising advantages compared to solid state sw...
Development of an integrated resonant MEMS temperature sensor
Köse, Talha; Azgın, Kıvanç; Akın, Tayfun; Department of Mechanical Engineering (2016)
This thesis presents the design, fabrication and characterization of a high performance, integrated, resonant MEMS temperature sensor, and temperature compensation of a capacitive MEMS accelerometer. Two different double-ended-tuning-fork (DETF) type resonator designs are developed and characterized for temperature sensing. The strain-amplifying beam structure is added to the DETF resonators in order to enhance thermal strain induced on the DETF tines due to the different thermal expansion coefficients of t...
High performance closed-loop analog readout circuit for capacitive MEMS accelerometers
Terzioğlu, Yunus; Akın, Tayfun; Department of Electrical and Electronics Engineering (2015)
In this thesis, a closed-loop analog readout circuit for capacitive MEMS accelerometers is introduced. The detailed analysis of the dynamics of the proposed accelerometer is presented along with the associated simulation models. The theoretical investigation of each building block of the accelerometer is also presented in detail and supported by the corresponding formulas. The implemented accelerometer is shown to satisfy the estimated performance parameters with measurements conducted using various test se...
Low-cost microbolometer infrared detectors utilizing CMOS resistive layers
Öztürk, Hande; Akın, Tayfun; Department of Electrical and Electronics Engineering (2017)
This thesis presents the efforts to develop low-cost microbolometer type uncooled infrared detector architectures that utilize standard CMOS layers and components. Various resistance structures of different CMOS technologies are investigated and possible resistors are determined as the active material. In order to figure out potential microbolometer structure, all possible layers in the CMOS technologies are analyzed in terms of mechanical and thermal parameters. Mathematical modeling and computer simulatio...
A Versatile 5th order sigma-delta modulation circuit for MEMS capacitive accelerometer characterization /
Asgarli, Tunjar; Akın, Tayfun; Department of Electrical and Electronics Engineering (2014)
With the significant developments in capacitive MEMS inertial sensors, tons of studies in the literature trying to enhance the performance parameters of MEMS capacitive accelerometer systems such as linearity, noise floor and bandwidth further has emerged. However, all the studies are conducted on a certain reference point, which is mainly the properties of the accelerometer sensor that alter a lot in the design of the high performance interface readout circuit. The designed interface circuits usually adopt...
Citation Formats
G. Demirhan, “Resonance-based MEMS temperature sensors for temperature compensation of mems capacitive accelerometer,” M.S. - Master of Science, Middle East Technical University, 2016.