High performance closed-loop analog readout circuit for capacitive MEMS accelerometers

Terzioğlu, Yunus
In this thesis, a closed-loop analog readout circuit for capacitive MEMS accelerometers is introduced. The detailed analysis of the dynamics of the proposed accelerometer is presented along with the associated simulation models. The theoretical investigation of each building block of the accelerometer is also presented in detail and supported by the corresponding formulas. The implemented accelerometer is shown to satisfy the estimated performance parameters with measurements conducted using various test setups. Moreover, two different multi-axis accelerometer applications, which are realized using the proposed readout circuit, are presented as well. The functionality of these two methods are verified with additional tests. The test results showed that 5.5 μg/√Hz noise floor, 5.4 μg bias instability, 0.2 mg bias repeatability, and ±35 g operation range is achieved with the proposed accelerometer.


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Citation Formats
Y. Terzioğlu, “High performance closed-loop analog readout circuit for capacitive MEMS accelerometers,” M.S. - Master of Science, Middle East Technical University, 2015.