An electrostatically actuated parylene microvalve for lab on a chip applications

Date

2011-07-05

Author

Yıldırım, Ender
Arıkan, Mehmet Ali Sahir
Külah, Haluk

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Creative Commons License

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

URI

https://hdl.handle.net/11511/33314

DOI

https://doi.org/10.1109/transducers.2011.5969441

Collections

Department of Mechanical Engineering, Conference / Seminar