An electrostatically actuated parylene microvalve for lab on a chip applications

Date

2011-07-05

Author

Yıldırım, Ender
Arıkan, Mehmet Ali Sahir
Külah, Haluk

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This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

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This paper presents a novel electrostatic microvalve to control in-plane flow on parylene based lab-on-a-chip-devices. Normally-closed design of the microvalve insulates the working fluid from the electric field, while providing low leakage up to 40 kPa inlet pressure. Prototypes are fabricated and tested for pull-in and flow characterization. Pull-in voltage is measured to be 150 V independent of the working fluid. No leakage is detected up to 20 kPa inlet pressure.

Subject Keywords

Microvalve, Parylene, Electrostatic, In-plane

URI

https://hdl.handle.net/11511/33314

DOI

https://doi.org/10.1109/transducers.2011.5969441

Collections

Department of Mechanical Engineering, Conference / Seminar

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Citation Formats

E. Yıldırım, M. A. S. Arıkan, and H. Külah, “An electrostatically actuated parylene microvalve for lab on a chip applications,” 2011, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/33314.