An electrostatically actuated parylene microvalve for lab on a chip applications

Date

2011-07-05

Author

Yıldırım, Ender
Arıkan, Mehmet Ali Sahir
Külah, Haluk

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

127
views

0
downloads

This paper presents a novel electrostatic microvalve to control in-plane flow on parylene based lab-on-a-chip-devices. Normally-closed design of the microvalve insulates the working fluid from the electric field, while providing low leakage up to 40 kPa inlet pressure. Prototypes are fabricated and tested for pull-in and flow characterization. Pull-in voltage is measured to be 150 V independent of the working fluid. No leakage is detected up to 20 kPa inlet pressure.

Subject Keywords

Microvalve, Parylene, Electrostatic, In-plane

URI

https://hdl.handle.net/11511/33314

DOI

https://doi.org/10.1109/transducers.2011.5969441

Collections

Department of Mechanical Engineering, Conference / Seminar

Suggestions

OpenMETU
Core

An electrostatic parylene microvalve for controlling in plane flow Yıldırım, Ender; Külah, Haluk (null; 2009-11-01) This paper presents analysis, implementation, and testing of a new and simple electrostatic microvalve for in-plane flow manipulation. The reported microvalve implements electrostatic pull-in of a parylene diaphragm located parallel to the flow.
An adaptive piezoelectric energy harvesting interface circuit with a novel peak detector Chamanian, S.; Zorlu, O.; Külah, Haluk; Muhtaroglu, A. (2015-03-26) This paper presents a fully self-powered interface circuit with a novel peak detector for piezoelectric energy harvesters (PEH). This circuit can be utilized to scavenge energy from low power environmental vibrations in 10s of mu W range. Synchronous switching technique is used to extract maximum available power where switching instants are detected independently from excitation changes of the PEH. The proposed peak detector senses voltages higher than power supply for a wide frequency range of input vibrat...
A low power readout circuit approach for uncooled resistive microbolometer FPAs Tepegoz, Murat; Toprak, Alperen; Akın, Tayfun (2008-03-20) This paper presents a new, low power readout circuit approach for uncooled resistive microbolometer FPAs. The readout circuits of the microbolometer detectors contain parallel readout channels whose outputs are driven and multiplexed on large bus capacitances in order to form the output of the readout circuit. High number of opamps used in the readout channel array and large output capacitances that these opamps should drive necessitates the use of high output current capacity structures, which results in l...
A Reconfigurable Microfluidic Transmitarray Unit Cell Erdil, Emre; Topalli, Kagan; Zorlu, Ozge; Toral, Taylan; YILDIRIM, ENDER; KÜLAH, HALUK; Aydın Çivi, Hatice Özlem (2013-04-12) This paper presents a novel microfluidics based approach to develop a reconfigurable circularly polarized transmitarray unit cell. The unit cell comprises double layer nested split ring slots formed as microfluidic channels that can be filled by fluids. Split regions in the slots are realized by injecting liquid metal into the channels. Beam steering is obtained by implementing rotational phase shifting via manipulating the liquid metal in the slots. X-band unit cell prototypes are fabricated on glass subst...
An electromagnetic micro energy harvester based on an array of parylene cantilevers Sari, Ibrahim; Balkan, Raif Tuna; Külah, Haluk (IOP Publishing, 2009-10-01) This paper presents the design, optimization and implementation of an electromagnetic type vibration-to-electrical micro energy harvester. The proposed harvester implements a new design employing array of parylene cantilevers on which planar gold coils are fabricated. The micro harvester generates voltage by virtue of the relative motion between the coils and a stationary magnet. The coils are connected electrically in series to sum up the voltage output from individual cantilevers. The number of cantilever...

Citation Formats

E. Yıldırım, M. A. S. Arıkan, and H. Külah, “An electrostatically actuated parylene microvalve for lab on a chip applications,” 2011, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/33314.