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An electrostatically actuated parylene microvalve for lab on a chip applications
Date
2011-07-05
Author
Yıldırım, Ender
Arıkan, Mehmet Ali Sahir
Külah, Haluk
Metadata
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This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
.
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This paper presents a novel electrostatic microvalve to control in-plane flow on parylene based lab-on-a-chip-devices. Normally-closed design of the microvalve insulates the working fluid from the electric field, while providing low leakage up to 40 kPa inlet pressure. Prototypes are fabricated and tested for pull-in and flow characterization. Pull-in voltage is measured to be 150 V independent of the working fluid. No leakage is detected up to 20 kPa inlet pressure.
Subject Keywords
Microvalve
,
Parylene
,
Electrostatic
,
In-plane
URI
https://hdl.handle.net/11511/33314
DOI
https://doi.org/10.1109/transducers.2011.5969441
Collections
Department of Mechanical Engineering, Conference / Seminar