An electrostatic parylene microvalve for controlling in plane flow

This paper presents analysis, implementation, and testing of a new and simple electrostatic microvalve for in-plane flow manipulation. The reported microvalve implements electrostatic pull-in of a parylene diaphragm located parallel to the flow.
13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 2009


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Citation Formats
E. Yıldırım and H. Külah, “An electrostatic parylene microvalve for controlling in plane flow,” presented at the 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 2009, Jeju; South Korea, 2009, Accessed: 00, 2021. [Online]. Available: