An electrostatic parylene microvalve for controlling in plane flow

Date

2009-11-01

Author

Yıldırım, Ender
Külah, Haluk

Metadata

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This paper presents analysis, implementation, and testing of a new and simple electrostatic microvalve for in-plane flow manipulation. The reported microvalve implements electrostatic pull-in of a parylene diaphragm located parallel to the flow.

Subject Keywords

Electrostatic actuators, Large displacements, Prepregs

URI

https://hdl.handle.net/11511/79003

Conference Name

13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 2009

Collections

Department of Mechanical Engineering, Conference / Seminar

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Citation Formats

E. Yıldırım and H. Külah, “An electrostatic parylene microvalve for controlling in plane flow,” presented at the 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 2009, Jeju; South Korea, 2009, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/79003.