Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes

Tatar, Erdinc
Alper, Said Emre
Akın, Tayfun
This paper presents experimental data about the sources of the quadrature error in a fully decoupled microelectromechanical systems gyroscope and demonstrates the extent of performance improvement by the cancellation of this error. Quadrature sources including mass, electrostatic-force, and mechanical-spring imbalances have been compared by FEM simulations, and spring imbalance has been found as the dominant source of the quadrature error. Gyroscopes have been designed with intentional spring imbalances and fabricated with a SOI-based silicon-on-glass fabrication process, the resulting quadrature outputs of the fabricated gyroscopes have been measured, and their agreement with FEM simulations has been verified. Next, it has been experimentally shown that the electrostatic nulling of the quadrature error with closed-loop control electronics improves the bias instability and angle random walk (ARW) of a fully decoupled gyroscope up to ten times. Moreover, the quadrature cancellation improves the scale-factor turn-on repeatability about four times and linearity about 20 times, reaching down to 119 and 86 ppm, respectively. Finally, the quadrature cancellation allows operating the gyroscope with higher drive-mode displacement amplitudes for an increased rate sensitivity. With this technique, outstanding bias instability and ARW performances of 0.39 degrees/h and 0.014 degrees/root h, respectively, have been achieved. [2011-0078]


Quadrature error compensation and its effects on the performance of fully decoupled MEMS gyroscopes
Tatar, Erdinç; Akın, Tayfun; Department of Electrical and Electronics Engineering (2010)
This thesis, for the first time in the literature, presents the effect of quadrature error compensation on the performance of a fully decoupled MEMS gyroscope and provides experimental data on the sources of quadrature error. Dedicated quadrature error cancellation electrodes operating with only differential DC potentials are designed. Gyroscopes with intentionally placed imperfections are fabricated with SOG based SOI process which provides higher yield and uniformity compared to SOG process. Tests show th...
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This paper presents experimental data about the sources of the quadrature error motion in a fully-decoupled MEMS gyroscope and demonstrates the extent of performance improvement by cancellation of this error, for the first time in the literature. This work experimentally examines different quadrature sources, determines significance of each source in the overall quadrature error, and concludes that the dominant error source is the imbalances in mechanical springs. Moreover, for the first time, it has been e...
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The scope of this thesis is to study the effects of temperature and acceleration on a MEMS gyroscope and present a workable solution to compensate these errors using various techniques. Compensation for errors is implemented considering the output bias data of the gyroscope. The study also provides comparison of these various techniques, namely Polynomial Curve fitting and Neural Networks. In addition, Moving Average Filtering is used as an auxiliary technique. The study provides novelty of compensating bot...
Citation Formats
E. Tatar, S. E. Alper, and T. Akın, “Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes,” JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, pp. 656–667, 2012, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/34323.