Show/Hide Menu
Hide/Show Apps
Logout
Türkçe
Türkçe
Search
Search
Login
Login
OpenMETU
OpenMETU
About
About
Open Science Policy
Open Science Policy
Open Access Guideline
Open Access Guideline
Postgraduate Thesis Guideline
Postgraduate Thesis Guideline
Communities & Collections
Communities & Collections
Help
Help
Frequently Asked Questions
Frequently Asked Questions
Guides
Guides
Thesis submission
Thesis submission
MS without thesis term project submission
MS without thesis term project submission
Publication submission with DOI
Publication submission with DOI
Publication submission
Publication submission
Supporting Information
Supporting Information
General Information
General Information
Copyright, Embargo and License
Copyright, Embargo and License
Contact us
Contact us
Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes
Date
2012-06-01
Author
Tatar, Erdinc
Alper, Said Emre
Akın, Tayfun
Metadata
Show full item record
This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
.
Item Usage Stats
269
views
0
downloads
Cite This
This paper presents experimental data about the sources of the quadrature error in a fully decoupled microelectromechanical systems gyroscope and demonstrates the extent of performance improvement by the cancellation of this error. Quadrature sources including mass, electrostatic-force, and mechanical-spring imbalances have been compared by FEM simulations, and spring imbalance has been found as the dominant source of the quadrature error. Gyroscopes have been designed with intentional spring imbalances and fabricated with a SOI-based silicon-on-glass fabrication process, the resulting quadrature outputs of the fabricated gyroscopes have been measured, and their agreement with FEM simulations has been verified. Next, it has been experimentally shown that the electrostatic nulling of the quadrature error with closed-loop control electronics improves the bias instability and angle random walk (ARW) of a fully decoupled gyroscope up to ten times. Moreover, the quadrature cancellation improves the scale-factor turn-on repeatability about four times and linearity about 20 times, reaching down to 119 and 86 ppm, respectively. Finally, the quadrature cancellation allows operating the gyroscope with higher drive-mode displacement amplitudes for an increased rate sensitivity. With this technique, outstanding bias instability and ARW performances of 0.39 degrees/h and 0.014 degrees/root h, respectively, have been achieved. [2011-0078]
Subject Keywords
Microelectromechanical systems (MEMS) gyro
,
Quadrature-error cancellation
,
Silicon-on-glass (SOG) process
,
Sources of quadrature error
URI
https://hdl.handle.net/11511/34323
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
DOI
https://doi.org/10.1109/jmems.2012.2189356
Collections
Department of Electrical and Electronics Engineering, Article
Suggestions
OpenMETU
Core
Quadrature error compensation and its effects on the performance of fully decoupled MEMS gyroscopes
Tatar, Erdinç; Akın, Tayfun; Department of Electrical and Electronics Engineering (2010)
This thesis, for the first time in the literature, presents the effect of quadrature error compensation on the performance of a fully decoupled MEMS gyroscope and provides experimental data on the sources of quadrature error. Dedicated quadrature error cancellation electrodes operating with only differential DC potentials are designed. Gyroscopes with intentionally placed imperfections are fabricated with SOG based SOI process which provides higher yield and uniformity compared to SOG process. Tests show th...
Optimized Transmission of 3D Video over DVB-H Channel
Bugdayci, Done; Akar, Gözde; Gotchev, Atanas (2012-01-17)
In this paper, we present a complete framework of an end-to-end error resilient transmission of 3D video over DVB-H and provide an analysis of transmission parameters. We perform the analysis for various layering, protection strategy and prediction structure using different contents and different channel conditions.
EFFECT OF QUADRATURE ERROR ON THE PERFORMANCE OF A FULLY-DECOUPLED MEMS GYROSCOPE
Tatar, E.; Alper, S. E.; Akın, Tayfun (2011-01-27)
This paper presents experimental data about the sources of the quadrature error motion in a fully-decoupled MEMS gyroscope and demonstrates the extent of performance improvement by cancellation of this error, for the first time in the literature. This work experimentally examines different quadrature sources, determines significance of each source in the overall quadrature error, and concludes that the dominant error source is the imbalances in mechanical springs. Moreover, for the first time, it has been e...
Convergence Error Estimation and Convergence Acceleration in Iteratively Solved Problems
Eyi, Sinan (null; 2012-07-09)
New methods are developed for convergence error estimation and convergence acceleration in iteratively solved problems. The convergence error estimation method is based on the eigenvalue analysis of linear systems, but it can also be used for nonlinear systems. The convergence of iterative method is accelerated by subtracting convergence error from the iteratively calculated solutions. The performances of these methods are demonstrated for the Laplace, Euler and NavierStokes equations.
Correction of temperature and acceleration effects on MEMS gyro output signals /
Ali, Muhammad; Akın, Tayfun; Azgın, Kıvanç; Department of Electrical and Electronics Engineering (2014)
The scope of this thesis is to study the effects of temperature and acceleration on a MEMS gyroscope and present a workable solution to compensate these errors using various techniques. Compensation for errors is implemented considering the output bias data of the gyroscope. The study also provides comparison of these various techniques, namely Polynomial Curve fitting and Neural Networks. In addition, Moving Average Filtering is used as an auxiliary technique. The study provides novelty of compensating bot...
Citation Formats
IEEE
ACM
APA
CHICAGO
MLA
BibTeX
E. Tatar, S. E. Alper, and T. Akın, “Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes,”
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
, pp. 656–667, 2012, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/34323.