Correction of temperature and acceleration effects on MEMS gyro output signals /

Ali, Muhammad
The scope of this thesis is to study the effects of temperature and acceleration on a MEMS gyroscope and present a workable solution to compensate these errors using various techniques. Compensation for errors is implemented considering the output bias data of the gyroscope. The study also provides comparison of these various techniques, namely Polynomial Curve fitting and Neural Networks. In addition, Moving Average Filtering is used as an auxiliary technique. The study provides novelty of compensating both the factors based on empirical data which is not done before this study. The thesis also discusses the hysteresis present in the gyroscope output data due to change in temperature slope (ascending and descending) and provides a solution to compensate this error. The relation between the magnitude of hysteresis and temperature range is formulated. The methodology adopted in this study is to use existing techniques with some modifications and to compensate different types of errors collectively. The techniques are implemented on data acquired from some commercial sensors, namely ADIS16488, ADXRS450, and XSENS MTi-10. In terms of bias instability temperature compensation can achieve up to 20% improvement (from 33.5⁰/hr to 26.5⁰/hr) in ADXRS450 and 50% improvement (from 12.24⁰/hr to 6.12⁰/hr) in XSENS MTi-10 sensors’ data. By including hysteresis compensation, the improvement can be increased to 28% (from 34.2⁰/hr to 26⁰/hr) and 57% (from 10.8⁰/hr to 4.68⁰/hr) for ADXRS450 and XSENS MTi-10 respectively. Compensating temperature, acceleration and hysteresis at the same time can improve the bias instability of XSENS MTi-10 up to 70% (from 16.56⁰/hr to 5.04⁰/hr). The compensation of these factors also reduces the rate random walk significantly, which is evident from Allan variance plots. The integration times can be improved 4 times for ADIS16488 and ADXRS450 and 8 times for XSENS MTi-10. The offset in the gyroscope output can be reduced 50 times (from 0.05⁰/sec to 0.001⁰/sec) by integrated compensation as compared to 10 times (from 0.05⁰/sec to 0.005⁰/sec) by conventional temperature compensation in the XSENS gyroscope data. Integrated compensation of temperature, acceleration and hysteresis results in better performance as compared to the conventional method of compensating only for temperature, providing a more accurate and error free data.


Compensation methos for quasi-static acceleration sensitivity of MEMS gyroscopes /
Gavcar, Hasan Doğan; Azgın, Kıvanç; Department of Electrical and Electronics Engineering (2014)
This thesis presents the quasi-static acceleration compensation methods for a fully decoupled MEMS gyroscope. These methods are based on the utilization of the amplitude difference information between the residual quadrature signals on the differential sense mode electrodes to sense the static acceleration acting on the sense mode of the gyroscope. There are three different quasi-static acceleration compensation methods presented in this thesis. In the first method, the static acceleration is measured by co...
Compensation of Temperature and Acceleration effects on MEMS Gyroscope
Ali, Muhammad (2016-01-16)
This paper shows temperature and acceleration effects on Micro-Electro-Mechanical-Systems (MEMS) gyroscope and a practical solution is presented to mitigate effect of these errors using different methods (Polynomial Curve fitting and Neural Networks). Compensation is performed on the output bias drift data acquired from different MEMS gyroscopes. Performance of compensation techniques is also presented in this study. This paper presents novelty of integrated compensation for both factors (temperature and ac...
Development of an integrated resonant MEMS temperature sensor
Köse, Talha; Azgın, Kıvanç; Akın, Tayfun; Department of Mechanical Engineering (2016)
This thesis presents the design, fabrication and characterization of a high performance, integrated, resonant MEMS temperature sensor, and temperature compensation of a capacitive MEMS accelerometer. Two different double-ended-tuning-fork (DETF) type resonator designs are developed and characterized for temperature sensing. The strain-amplifying beam structure is added to the DETF resonators in order to enhance thermal strain induced on the DETF tines due to the different thermal expansion coefficients of t...
Performance of CMS hadron calorimeter timing and synchronization using test beam, cosmic ray, and LHC beam data
Chatrchyan, S.; et. al. (IOP Publishing, 2010-03-01)
This paper discusses the design and performance of the time measurement technique and of the synchronization systems of the CMS hadron calorimeter. Time measurement performance results are presented from test beam data taken in the years 2004 and 2006. For hadronic showers of energy greater than 100 GeV, the timing resolution is measured to be about 1.2 ns. Time synchronization and out-of-time background rejection results are presented from the Cosmic Run At Four Tesla and LHC beam runs taken in the Autumn ...
Design of a MEMS based hydraulic pressure sensor
Göreke, Utku; Azgın, Kıvanç; Beyaz, Mustafa İlker; Department of Micro and Nanotechnology (2016)
This dissertation presents a novel technique for detection of hydraulic pressure by using a MEMS resonant sensor. Proposed sensor utilizes a double ended tuning fork (DETF) resonator. In the literature tuning forks are used for measurement of the deflection of a diaphragm. However, in this study, a tuning fork is configured to lay in orthogonal direction with a diaphragm of which center point deflection is being measured. Upon application of pressure, center deflection of the diaphragm induces an axial comp...
Citation Formats
M. Ali, “Correction of temperature and acceleration effects on MEMS gyro output signals /,” M.S. - Master of Science, Middle East Technical University, 2014.