Noise analysis and characterization of a sigma-delta/capacitive microaccelerometer

Date

2006-02-01

Author

Külah, Haluk
Yazdi, N
Najafi, K

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This paper reports a high-sensitivity low-noise capacitive accelerometer system with one micro-g/root Hz resolution. The accelerometer and interface electronics together operate as a second-order electromechanical sigma-delta modulator. A detailed noise analysis of electromechanical sigma-delta capacitive accelerometers with a final goal of achieving sub-jig resolution is also presented. The analysis and test results have shown that amplifier thermal and sensor charging reference voltage noises are dominant in open-loop mode of operation. For closed-loop mode of operation, mass-residual motion is the dominant noise source at low sampling frequencies. By increasing the sampling frequency, both open-loop and closed-loop overall noise can be reduced significantly. The interface circuit has more than 120 dB dynamic range and can resolve better than 10 aF. The complete module operates from a single 5-V supply and has a measured sensitivity of 960 mV/g with a noise floor of 1.08 mu g/root Hz in open-loop. This system can resolve better than 10 mu g/root Hz in closed-loop.

Subject Keywords

Capacitive readout, Inertial sensors, Microaccelerometers, micro-g, Sigma-delta, Switched capacitor

URI

https://hdl.handle.net/11511/35661

Journal

IEEE JOURNAL OF SOLID-STATE CIRCUITS

DOI

https://doi.org/10.1109/jssc.2005.863148

Collections

Department of Electrical and Electronics Engineering, Article

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Citation Formats

H. Külah, N. Yazdi, and K. Najafi, “Noise analysis and characterization of a sigma-delta/capacitive microaccelerometer,” IEEE JOURNAL OF SOLID-STATE CIRCUITS, pp. 352–361, 2006, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/35661.