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Precision readout circuits for capacitive microaccelerometers
Date
2004-01-01
Author
Yazdi, N
Külah, Haluk
Najafi, K
Metadata
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This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
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This paper presents a review of capacitive readout front-end circuits for high-precision accelerometers. The primary design parameters and the trade-offs affecting the resolution are presented. The discussions apply to all capacitive microsensor interfaces. Also a high-sensitivity capacitive accelerometer interface circuit for hybrid-integration with a surface/bulk micromachined micro-g accelerometer is described [7, 10]. The first generation of the circuit resolves 75aF of capacitance on similar to 120pF parasitic capacitance with a 200kHz sampling rate, and the second generation resolves 20aF with 1MHz sampling rate. The overall sensor-circuit module has a noise floor of 1.6 mu g/root HZ at ambient atmosphere.
Subject Keywords
Capacitive sensor readout circuit
,
MEMS accelerometer
,
Interface
,
Micro-g accelerometer
URI
https://hdl.handle.net/11511/46772
DOI
https://doi.org/10.1109/icsens.2004.1426091
Collections
Department of Electrical and Electronics Engineering, Conference / Seminar