Precision readout circuits for capacitive microaccelerometers

Yazdi, N
Külah, Haluk
Najafi, K
This paper presents a review of capacitive readout front-end circuits for high-precision accelerometers. The primary design parameters and the trade-offs affecting the resolution are presented. The discussions apply to all capacitive microsensor interfaces. Also a high-sensitivity capacitive accelerometer interface circuit for hybrid-integration with a surface/bulk micromachined micro-g accelerometer is described [7, 10]. The first generation of the circuit resolves 75aF of capacitance on similar to 120pF parasitic capacitance with a 200kHz sampling rate, and the second generation resolves 20aF with 1MHz sampling rate. The overall sensor-circuit module has a noise floor of 1.6 mu g/root HZ at ambient atmosphere.


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Aydemir, Akin; Terzioglu, Yunus; Akın, Tayfun (2016-06-15)
This paper presents a new fabrication approach and design for a three axis capacitive MEMS accelerometer that is capable of measuring externally applied accelerations in three orthogonal axes. Individual lateral and vertical axis accelerometers are fabricated in the same die on an SOI wafer which is anodically bonded to a glass substrate. Handle layer of the SOI wafer is used as the top electrode for the vertical axis accelerometer. This accelerometer has a 2 mm(2) perforated electrode area anchored to the ...
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Aydemir, Akin; Akın, Tayfun (2015-11-04)
This paper presents a new fabrication approach and a design for the fabrication of a three-axis capacitive MEMS accelerometer where differential sensing is enabled for all sense directions. In this approach, individual lateral and vertical axis accelerometers are fabricated in the same die on an SOI wafer which is eutectically bonded to a glass substrate. Differential sensing for the vertical axis accelerometer is realized by defining the proof mass of the accelerometer on the structural layer of the SOI wa...
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Ali, Muhammad; Akın, Tayfun; Department of Electrical and Electronics Engineering (2022-11)
This study proposes a new digital control loop-based compact readout circuit for a resonant MEMS accelerometer providing high performance with reduced temperature and power supply dependence while utilizing low processing power. The readout circuit utilizes a charge-sensing pre-amplifier stage that converts the small motional current to readable voltage, which is then converted to the digital domain using a 16-bit ADC to perform the amplitude and frequency extraction in the digital domain. A Proportional In...
Citation Formats
N. Yazdi, H. Külah, and K. Najafi, “Precision readout circuits for capacitive microaccelerometers,” 2004, Accessed: 00, 2020. [Online]. Available: