Non-destructive patterning of 10nm magnetic island array by phase transformation with low-energy proton irradiation

Date

2017-10-09

Author

Dutta, Tanmay
PATHAK, Sachin
ASBAHİ, Mohamed
Celik, Kubra
Lee, Jong Min
Yang, Ping
Saifullah, M. S. M.
Oral, Ahmet
Bhatia, C. S.
CHA, Jongin
HONG, Jongill
Yang, Hyunsoo

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

188
views

0
downloads

Nano-patterning on the order of sub-10 nm is integral to achieve high-density nano-scale devices for various data storage and data processing applications. However, the additional requirement of planarization and unwanted side-effects of physical or chemical etching have so far limited the patterning of sub-10nm devices. In this work, we have demonstrated the creation of an array of similar to 10nm ferromagnetic islands through selective phase transformation of paramagnetic multilayers by low-energy proton irradiation. Paramagnetic Co3O4/Pd multilayers masked with patterned PMMA (polymethyl methacrylate) were reduced to ferromagnetic Co/Pd by proton irradiation. A clear contrast of the nano-islands was observed using magnetic force microscopy, establishing the formation of ferromagnetic nano-islands with perpendicular magnetic anisotropy. This process provides a way to circumvent the side-effects associated with both conventional nano-scale pattering and high-energy ion irradiation. Therefore, phase transformation by low energy proton irradiation can be used for patterning sub-10nm nano-islands, not only for magnetic data storage but also for patterning various opto-electronic and spintronic devices. Published by AIP Publishing.

Subject Keywords

Ion irradiation, Imprint lithography, Beam lithography, Media, Anisotropy, Nanostructures, Fabrication, Challenges

URI

https://hdl.handle.net/11511/35971

Journal

APPLIED PHYSICS LETTERS

DOI

https://doi.org/10.1063/1.4998670

Collections

Department of Physics, Article

Suggestions

OpenMETU
Core

Real-time 2D/3D display of dted maps and evaluation of interpolation algorithms Demir, Ali; Coşar, Ahmet; Department of Geodetic and Geographical Information Technologies (2010) In Geographic Information System (GIS) applications, aster data constitutes one of the major data types. The displaying of the raster data has an important part in GIS applications. Digital Terrain Elevation Data (DTED) is one of the raster data types, which is used as the main data source in this thesis. The DTED data is displayed on the screen as digital images as a pixel value, which is represented in gray scale, corresponding to an elevation (texel). To draw the images, the texel values are mostly inter...
Fabrication of nano- to micron-sized patterns using zeolites: Its application in BSA adsorption Kirdeciler, SALİH KAAN; Özen, Can; Akata, Burcu (2014-06-01) Nano to micron-sized zeolite A (Z-A) and silicalite (Z-SIL) patterns were generated using the combinations of electron beam lithography (EBL) or photolithography (PL) with direct attachment method to be able to generate differentiated areas on a single surface in a cheap and facile way. The possibility to generate minimum sized zeolite patterns on top of zeolite monolayers was investigated by using EBL to understand the capability of the system for the first time. Also generation of large scale zeolite patt...
EndNet: Sparse AutoEncoder Network for Endmember Extraction and Hyperspectral Unmixing Ozkan, Savas; Kaya, Berk; Akar, Gözde (2019-01-01) Data acquired from multichannel sensors are a highly valuable asset to interpret the environment for a variety of remote sensing applications. However, low spatial resolution is a critical limitation for previous sensors, and the constituent materials of a scene can be mixed in different fractions due to their spatial interactions. Spectral unmixing is a technique that allows us to obtain the material spectral signatures and their fractions from hyperspectral data. In this paper, we propose a novel endmembe...
ELECTRICAL-IMPEDANCE TOMOGRAPHY USING INDUCED CURRENTS Gençer, Nevzat Güneri; Kuzuoğlu, Mustafa (1994-06-01) The mathematical basis of a new imaging modality, Induced Current Electrical Impedance Tomography (EIT), is investigated. The ultimate aim of this technique is the reconstruction of conductivity distribution of the human body, from voltage measurements made between electrodes placed on the surface, when currents are induced inside the body by applied time varying magnetic fields. In this study the two-dimensional problem is analyzed. A specific 9-coil system for generating nine different exciting magnetic f...
Development of resonant mass sensors for MEMS based real time cell detection applications Kangül, Mustafa; Külah, Haluk; Department of Electrical and Electronics Engineering (2015) This thesis represents design and implementation of MEMS based resonant mass sensors for cell detection applications. The main objective of the thesis is real-time detection inside liquid medium and obtaining the results by electronic means, without the assistance of bulky optical instruments. Novel resonant based mass sensor architectures that have various improvements over selected benchmark design are presented. Purpose of the new structures is to establish real-time mass detection by improving the quali...

Citation Formats

T. Dutta et al., “Non-destructive patterning of 10nm magnetic island array by phase transformation with low-energy proton irradiation,” APPLIED PHYSICS LETTERS, pp. 0–0, 2017, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/35971.