Slicing Crystalline Silicon Wafer by Deep Subsurface Laser Processing and Selective Chemical Etching

Download

Date

2019-06-23

Author

zolfaghari borra, mona
Nasser, Hisham
ÇİFTPINAR, EMİNE HANDE
turnalı, ahmet
deminsky, petro
Çolakoğlu, Tahir
TOKEL, ONUR
İLDAY, FATİH ÖMER
PAVLOV, IHOR
TURAN, RAŞİT
Bek, Alpan

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

180
views

0
downloads

In this work, we demonstrate use of laser-induced silicon slicing (LASIS) technique to fabricate crystalline silicon (c-Si) slices [1]. In LASIS method, a nanosecond-pulsed fiber laser operating at 1.55 μm wavelength, focused deep in Si subsurface induces structural modifications near the focal point due to multiphoton absorption. The raster scan of the focal position inside of the sample, positioned in cross-sectional plane with respect to laser beam, produces a quasi-2D modified Si region. The modified Si region is then etched by cupper nitrite (Cu(NO 3 ) 2 )-based selective chemical etchant which selectively targets the laser-modified regions. In order to achieve high etch rate, smooth and defect-free surface; different concentrations of etchant components and etch durations were investigated.

Subject Keywords

Silicon, Fiber lasers, Physics, Chemical lasers, Hafnium

URI

https://hdl.handle.net/11511/37784

DOI

https://doi.org/10.1109/cleoe-eqec.2019.8872359

Collections

Department of Physics, Conference / Seminar

Suggestions

OpenMETU
Core

FABRICATION AND CHARACTERIZATION OF SERS SUBSTRATES VIA LASER INDUCED PHOTOCHEMICAL SURFACE ROUGHENING OF SILICON Akbıyık, Alp; Bek, Alpan; Department of Physics (2022-6-10) In this thesis, Surface-Enhanced Raman Spectroscopy (SERS) substrates are fabricated using laser assisted chemical etching of silicon as a surface nanostructuring technique. As a novel method of control over the structuring parameters, the incident laser illumination is spatially modified via a Digital Micromirror Device (DMD) that enable fast and uniform fabrication of complex structures. Onto the photochemically nanostructured silicon surfaces, silver and gold films are deposited by thermal evaporation or...
Nano patterning of AISI 316L stainless steel with Nonlinear Laser Lithography: Sliding under dry and oil-lubricated conditions Gnilitskyi, Iaroslav; Rotundo, Fabio; Martini, Carla; Pavlov, Ihor; Ilday, Serim; Vovk, Evgeny; Ilday, Fatih Omer; Orazi, Leonardo (2016-07-01) Femtosecond laser-based Nonlinear Laser Lithography (NLL) was applied to AISI 316L stainless steel, which requires surface modification to achieve satisfactory tribological behaviour. NLL advances over the well-known Laser Induced Periodic Surface Structures (LIPSS) in terms of uniformity and long-range order of high speeds, over large areas. A galvanometric scanner head was used for an high production rate. Dry and lubricated sliding tests, considering different orientations of the nanotexture showed that ...
Metal-assisted nano-textured solar cells with SiO2/Si3N4 passivation Es, Fırat; Baytemir, Gulsen; Kulakci, Mustafa; Turan, Raşit (2017-02-01) We demonstrate the fabrication of nano-sized surface textured crystalline silicon by a metal-assisted electroless etching method with nitric acid added as the hole injection agent. This method generates randomly shaped cone-like structures that offer a clear advantage over nanowires by enabling straightforward passivation with standard techniques. Average reflection values as low as 3% have been achieved. Optimizing the thickness of anti-reflective coatings, the doping depth and the screen-printed metal fir...
Synthesis and Characterization of Aluminum Containing Silica Aerogel Catalysts for Degradation of PLA Sivri, Seda; Dilek Hacıhabiboğlu, Çerağ; Sezgi, Naime Aslı (Walter de Gruyter GmbH, 2019-05-01) Aluminum loaded silica aerogel based catalysts were synthesized by impregnation of aluminum into silica aerogel produced using sol-gel method in different aluminum loadings (2.5-15 wt%) to investigate their performances in degradation of polylactic acid (PLA).
Enhanced Light Emission from Erbium Doped Silicon Nitride in Plasmonic Metal-Insulator-Metal Structures Gong, Yiyang; Yerci, Selçuk; Li, Rui; Dal Negro, Luca; Vuckovic, Jelena (2009-11-09) Plasmonic gratings and nano-particle arrays in a metal-insulator-metal structures are fabricated on an erbium doped silicon nitride layer. This material system enables simple fabrication of the structure, since the active nitride layer can be directly grown on metal. Enhancement of collected emission of up to 12 is observed on resonance, while broad off-resonant enhancement is also present. The output polarization behavior of the gratings and nano-particle arrays is investigated and matched to plasmonic res...

Citation Formats

m. zolfaghari borra et al., “Slicing Crystalline Silicon Wafer by Deep Subsurface Laser Processing and Selective Chemical Etching,” 2019, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/37784.