Particle in cell/Monte Carlo collision analysis of the problem of identification of impurities in the gas by the plasma electron spectroscopy method

Download

index.pdf

Date

2016-06-01

Author

SARIKAYA, C. Kusoglu
Rafatov, İsmail
KUDRYAVTSEV, A. A.

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

162
views

0
downloads

The work deals with the Particle in Cell/Monte Carlo Collision (PIC/MCC) analysis of the problem of detection and identification of impurities in the nonlocal plasma of gas discharge using the Plasma Electron Spectroscopy (PLES) method. For this purpose, 1d3v PIC/MCC code for numerical simulation of glow discharge with nonlocal electron energy distribution function is developed. The elastic, excitation, and ionization collisions between electron-neutral pairs and isotropic scattering and charge exchange collisions between ion-neutral pairs and Penning ionizations are taken into account. Applicability of the numerical code is verified under the Radio-Frequency capacitively coupled discharge conditions. The efficiency of the code is increased by its parallelization using Open Message Passing Interface. As a demonstration of the PLES method, parallel PIC/MCC code is applied to the direct current glow discharge in helium doped with a small amount of argon. Numerical results are consistent with the theoretical analysis of formation of nonlocal EEDF and existing experimental data. Published by AIP Publishing.

Subject Keywords

Negative-glow, Simulation, Discharge, Kinetics, Helium

URI

https://hdl.handle.net/11511/38198

Journal

PHYSICS OF PLASMAS

DOI

https://doi.org/10.1063/1.4954917

Collections

Department of Physics, Article

Suggestions

OpenMETU
Core

Particle in Cell Monte Carlo Collision Analysis of the Problem of Identification of Impurities in Gas within the Plasma Electron Spectroscopy Method Kuşoğlu Sarıkaya, Cemre; Rafatov, İsmail; Kudryavtsev, Anatoly (null; 2016-10-10) Particle in Cell/Monte Carlo Collision (PIC/MCC) analysis of the problem of identification of impurities in gas within the Plasma Electron Spectroscopy (PLES) method is carried out. The idea of the PLES is based on the analysis of the effect on the EEDF due to electrons, released in the Penning reactions between the metastable atoms of working gas and impurity. 1d3v PIC/MCC numerical code is developed and verified under the conditions of RF capacitively coupled discharge in helium. The efficiency of the cod...
Particle in Cell/Monte Carlo Collision Method for Simulation of RF Glow Discharges: Effect of Super Particle Weighting ERDEN, E.; Rafatov, İsmail (Wiley, 2014-08-01) A parallel Particle in Cell/Monte Carlo Collision (PIC/MCC) numerical code for glow discharge plasma simulations is developed and verified. This method is based on simultaneous solution of the Lorentz equations of motion of super particles, coupled with the Poisson's equation for electric field. Collisions between the particles are modelled by the Monte Carlo method. Proper choice of particle weighting is critically important in order to perform adequate and efficient PIC simulations of plasma. Herein, effe...
Optimization of open-tube furnace diffusion with Bbr3 liquid source for industrial p-type boron doping process Orhan, Efe; Kökbudak, Gamze; Semiz, Emel; Es, Fırat; Turan, Raşit (Middle East Technical University; 2018-07-06) In this study, optimization of boron emitter for n-type crystalline Si solar cells has been studied in detail. Industrial open-tube (atmospheric) furnace with BBr3 as liquid B source was utilized which is a preferred dopant for the diffusion process of n-type wafers in industry [1] [2]. During the processes, full boat (270 wafers) n-type square samples were used to investigate the uniformity from gas zone to door zone and inside the wafer. To achieve uniform boron emitters on large n-type substrates, parame...
Kinetic analysis of DSC and thermogravimetry data for combustion of lignite Kök, Mustafa Verşan (1996-06-01) Thermal analysis increasingly being used to obtain kinetic data relating to sample decomposition. This work involves a comparative study of several methods used to analyse DSC and TG/DTG data obtained on the oxidation of Beypazari lignite. A general computer program was developed and the methods are compared with regard to their accuracy and the ease of interpretation of the kinetics of thermal decomposition. For this study, the ratio method was regarded as the preferred method, because it permits the estim...
Transport studies of carbon-rich a-SiCx : H film through admittance and deep-level transient spectroscopy measurements Atilgan, I; Ozdemir, O; Akaoglu, B; Sel, K; Katircioglu, B (Informa UK Limited, 2006-07-01) An intrinsic, carbon- rich a- SiCx: H thin film, prepared by the plasma- enhanced chemical vapour deposition ( PECVD) technique, has been studied mainly by AC admittance and small- pulse deep- level transient spectroscopy ( DLTS) measurements on an Al/ a- SiCx: H/ p- Si metal - insulator - semiconductor ( MIS) structure. The effects of measurement temperature, voltage and small- signal AC modulation frequency on the MIS capacitor are qualitatively and quantitatively described. The kinetics of charge injecti...

Citation Formats

C. K. SARIKAYA, İ. Rafatov, and A. A. KUDRYAVTSEV, “Particle in cell/Monte Carlo collision analysis of the problem of identification of impurities in the gas by the plasma electron spectroscopy method,” PHYSICS OF PLASMAS, pp. 0–0, 2016, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/38198.