Electrical characterization of low defect density nonpolar (11(2)over-bar0) a-plane GaN grown with sidewall lateral epitaxial overgrowth (SLEO)

İmer, Muhsine Bilge
Rajan, Siddharth
Keller, Stacia
Mishra, Umesh K.
Nakamura, Shuji
Speck, James S.
DenBaars, Steven P.
We studied the effect of extended defects on electrical characteristics of Si doped n-type nonpolar a-plane GaN films. The n-type GaN layers were grown on co-loaded reduced defect density sidewall lateral epitaxial overgrowth (SLEO) a-plane GaN templates and high defect density planar a-plane GaN templates by metalorganic chemical vapor deposition (MOCVD). The highest conductivity value was observed at the carrier concentration of 1.05 x 10(19) cm(-3) as 261.12 cm(2)/Vs for SLEO a-GaN and 106.77 cm(2)/Vs for the planar a-plane GaN samples. At the same doping level, the carrier compensation for SLEO samples was similar to 12% less than planar samples.


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Citation Formats
M. B. İmer et al., “Electrical characterization of low defect density nonpolar (11(2)over-bar0) a-plane GaN grown with sidewall lateral epitaxial overgrowth (SLEO),” JOURNAL OF MATERIALS RESEARCH, pp. 551–555, 2008, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/38683.