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Electrical characterization of low defect density nonpolar (11(2)over-bar0) a-plane GaN grown with sidewall lateral epitaxial overgrowth (SLEO)
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Date
2008-02-01
Author
İmer, Muhsine Bilge
Haskell, Benjamin
Rajan, Siddharth
Keller, Stacia
Mishra, Umesh K.
Nakamura, Shuji
Speck, James S.
DenBaars, Steven P.
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We studied the effect of extended defects on electrical characteristics of Si doped n-type nonpolar a-plane GaN films. The n-type GaN layers were grown on co-loaded reduced defect density sidewall lateral epitaxial overgrowth (SLEO) a-plane GaN templates and high defect density planar a-plane GaN templates by metalorganic chemical vapor deposition (MOCVD). The highest conductivity value was observed at the carrier concentration of 1.05 x 10(19) cm(-3) as 261.12 cm(2)/Vs for SLEO a-GaN and 106.77 cm(2)/Vs for the planar a-plane GaN samples. At the same doping level, the carrier compensation for SLEO samples was similar to 12% less than planar samples.
Subject Keywords
Mechanical Engineering
,
General Materials Science
,
Mechanics of Materials
,
Condensed Matter Physics
URI
https://hdl.handle.net/11511/38683
Journal
JOURNAL OF MATERIALS RESEARCH
DOI
https://doi.org/10.1557/jmr.2008.0069
Collections
Department of Metallurgical and Materials Engineering, Article