Fabrication of SiO2-stacked diamond membranes and their characteristics for microelectromechanical applications

Date

2011-04-01

Author

Bayram, Barış

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Diamond is a promising microelectromechanical systems (MEMS) material due to its high Young's Modulus and very large thermal conductivity. In this work, ultrananocrystalline diamond was stacked between silicon dioxide to form thermally-stable and robust membranes. These SiO2-stacked diamond layers were processed into MEMS-compatible membranes. For comparison, membranes composed of only SiO2 were fabricated as well. The structural characteristics of these membranes are compared and analyzed for membranes of different diameters. Using finite element modeling, the experimental behaviors of SiO2 and SiO2-stacked diamond membranes are analyzed.

Subject Keywords

Mechanical Engineering, Electrical and Electronic Engineering, Materials Chemistry, General Physics and Astronomy, Electronic, Optical and Magnetic Materials, General Chemistry

URI

https://hdl.handle.net/11511/39174

Journal

DIAMOND AND RELATED MATERIALS

DOI

https://doi.org/10.1016/j.diamond.2011.01.047

Collections

Department of Electrical and Electronics Engineering, Article

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Citation Formats

B. Bayram, “Fabrication of SiO2-stacked diamond membranes and their characteristics for microelectromechanical applications,” DIAMOND AND RELATED MATERIALS, pp. 459–463, 2011, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/39174.