Micromachined accelerometers for inertial navigation applications

Date

2005-01-01

Author

Chae, Junseok
Külah, Haluk
Najafi, Khalil

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This paper presents research at The University of Michigan on micromachined accelerometers and their interface electronics to satisfy the requirements for inertial navigation applications. The accelerometer systems developed employ in-plane (lateral), out-of-plane (z-axis), and single-chip 3-axis sensors with the interface electronics. The interface electronics forms a second-order electromechanical sigma-delta modulator together with the sensor and the system can be operated in both open and closed-loop. These devices can achieve better than 2μg/√Hz resolution with a range of ±1.35g.

URI

https://hdl.handle.net/11511/39748

DOI

https://doi.org/10.4271/2005-01-1898

Conference Name

SAE 2005 World Congress & Exhibition

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

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Citation Formats

J. Chae, H. Külah, and K. Najafi, “Micromachined accelerometers for inertial navigation applications,” presented at the SAE 2005 World Congress & Exhibition, 2005, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/39748.