Synthesis and characterization of boron carbide films by plasma-enhanced chemical vapor deposition

Date

2003-03-01

Author

Eroglu, OD
Sezgi, Naime Aslı
Ozbelge, HO
Durmazucar, HH

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

132
views

0
downloads

The plasma-enhanced chemical vapor deposition of boron carbide was investigated on quartz glass and alumina substrates from a gas mixture of BCl3, H-2, and CH4 in an inductively coupled plasma (ICP) medium produced by a radio frequency (RF) discharged onto the gases passing through a tubular reactor under atmospheric pressure. A thin solid boron carbide coating with a gray color was deposited on both substrates. The results of XRD revealed that the major solid phase formed in the coating material was beta-rhombohedral B4C. The SEM analysis showed that the surface homogeneity increased with an increase in the exposure time, and different boron carbide structures were formed at different RF powers and exposure times.

Subject Keywords

Boron carbide, PECVD, XRD, SEM, Coating

URI

https://hdl.handle.net/11511/40674

Journal

CHEMICAL ENGINEERING COMMUNICATIONS

DOI

https://doi.org/10.1080/00986440390183384

Collections

Department of Chemical Engineering, Article

Suggestions

OpenMETU
Core

Synthesis of boron nitride nanotubes from ammonia and a powder mixture of boron and iron oxide Ozmen, Didem; Sezgi, Naime Aslı; BALCI, FATMA SUNA (2013-03-01) Boron nitride nanotubes (BNNTs) were synthesized from the reaction of ammonia gas with a powder mixture of boron and iron oxide in a tubular reactor connected to a mass spectrometer for the on-line chemical analysis of the reactor outlet stream at different temperatures and inlet gas compositions. XRD results showed that hexagonal and rhombohedral boron nitrides, iron, boron oxide, and iron boride were the solid phases formed in these materials depending on the reaction temperature and gas composition. It w...
Kinetic investigation of chemical vapor deposition of B4C on tungsten substrate Karaman, Mustafa; Sezgi, Naime Aslı; Doğu, Timur; Ozbelge, H. Onder (2006-12-01) Production of beta-rhombohedral boron carbide (B4C) on a tungsten substrate by the chemical vapor deposition from a BCl3-H-2-CH4 gas mixture was achieved. An impinging-jet reactor was used to minimize the mass-transfer limitations on the reaction kinetics, which made a detailed kinetic investigation possible. Results of the XRD and XPS analyses showed that the solid product formed on the substrate is a rhombohedral B4C phase. Both dichloroborane and boron carbide formation rates were found to increase with ...
Synthesis of carbon nanotubes by a plasma based pulsed electron beam generator Goktas, H.; Ayhan, U. B.; Gündüz, Güngör; Disbudak, H.; Eryilmaz, E.; Oke, G.; Cicek, B.; Somer, M. (IOP Publishing, 2006-01-01) Carbon nanotubes (CNTs) were synthesized by using a plasma based electron beam generator, which has a fast filamentary discharge formed from the superposition of an ordinary low-pressure dc glow and a high-current pulsed discharge. To our knowledge, CNTs are synthesized for the first time by this method. Acetylene was used as the carbon source and the iron catalyst coated silica substrates were prepared by the sol-gel technique. The silica plates were first coated with an appropriate iron (III) nitrate solu...
Production of boron nitride by carbothermic and mechanochemical methods, and nanotube formation Camurlu, HE; Aydogdu, A; Topkaya, Yavuz Ali; Sevinc, N (2003-09-12) The formation of hexagonal boron nitride by carbothermic reduction of boron oxide and nitridation has been examined. Experiments were conducted in the temperature range of 1100-1500degreesC for durations between 15-240 minutes. Products were examined by X-ray, SEM and chemical analysis. The results showed that the reaction proceeds through a gaseous boron containing species, which is most probably 13203(g). It was found that all of the carbon was consumed and formation of boron nitride was complete in 2 hou...
Characterization and kinetics of light crude oil combustion in the presence of metallic salts Kök, Mustafa Verşan (American Chemical Society (ACS), 2004-05-01) In this research, a reaction cell, thermogravimetry (TG), and differential thermal analysis (DTA) were used to characterize the light crude oil combustion and kinetics in the presence of copper(I) chloride (CuCl) and magnesium chloride (MgCl2·6H2O). In TG-DTA experiments with magnesium chloride, three reaction regions were identified, known as distillation, low-temperature oxidation (LTO), and high-temperature oxidation (HTO). In the case of copper(I) chloride, two main transitional stages are observed with...

Citation Formats

O. Eroglu, N. A. Sezgi, H. Ozbelge, and H. Durmazucar, “Synthesis and characterization of boron carbide films by plasma-enhanced chemical vapor deposition,” CHEMICAL ENGINEERING COMMUNICATIONS, pp. 360–372, 2003, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/40674.