Show/Hide Menu
Hide/Show Apps
anonymousUser
Logout
Türkçe
Türkçe
Search
Search
Login
Login
OpenMETU
OpenMETU
About
About
Open Science Policy
Open Science Policy
Communities & Collections
Communities & Collections
Help
Help
Frequently Asked Questions
Frequently Asked Questions
Videos
Videos
Thesis submission
Thesis submission
Publication submission with DOI
Publication submission with DOI
Publication submission
Publication submission
Contact us
Contact us
Kinetic investigation of chemical vapor deposition of B4C on tungsten substrate
Date
2006-12-01
Author
Karaman, Mustafa
Sezgi, Naime Aslı
Doğu, Timur
Ozbelge, H. Onder
Metadata
Show full item record
This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
.
Item Usage Stats
10
views
0
downloads
Cite This
Production of beta-rhombohedral boron carbide (B4C) on a tungsten substrate by the chemical vapor deposition from a BCl3-H-2-CH4 gas mixture was achieved. An impinging-jet reactor was used to minimize the mass-transfer limitations on the reaction kinetics, which made a detailed kinetic investigation possible. Results of the XRD and XPS analyses showed that the solid product formed on the substrate is a rhombohedral B4C phase. Both dichloroborane and boron carbide formation rates were found to increase with an increase in the inlet molar fraction of BCl3. The formation rate of boron carbide increased with an increase in the inlet molar fraction of CH4. However, no effect on the formation rate of dichloroborane was observed with an increase in the inlet molar fraction of methane. The activation energy of the boron carbide formation reaction was ascertained to be 56.1 +/- 4.0 kJ/mol. The boron carbide formation reaction was proportional with the 0.34 +/- 0.055 power of the initial boron trichloride concentration and 0.64 +/- 0.084 power of the initial methane concentration. (c) 2006 American Institute of Chemical Engineers.
Subject Keywords
Chemical vapor deposition (CVD)
,
Boron carbide
,
Refractory fibers
,
Hard coatings
,
Jet impingement
URI
https://hdl.handle.net/11511/32324
Journal
AICHE JOURNAL
DOI
https://doi.org/10.1002/aic.11017
Collections
Graduate School of Natural and Applied Sciences, Article
Citation Formats
IEEE
ACM
APA
CHICAGO
MLA
BibTeX
M. Karaman, N. A. Sezgi, T. Doğu, and H. O. Ozbelge, “Kinetic investigation of chemical vapor deposition of B4C on tungsten substrate,”
AICHE JOURNAL
, vol. 52, no. 12, pp. 4161–4166, 2006, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/32324.