Quantitative electrostatic force measurement in AFM

Date

2000-04-02

Author

JEFFERY, Steve
Oral, Ahmet
Pethica, John B.

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We describe a method for measuring forces in the atomic force microscope (AFM), in which a small amplitude oscillation(similar to 1 Angstrom(p-p)) is applied to a stiff(similar to 40 N/m) cantilever below its first resonant frequency, and the force gradient is measured directly as a function of separation. We have used this instrument to measure electrostatic forces by applying an ac voltage between the tip and the sample, and observed a variation in contact potential difference with separation. We also show how the benefits of this instrument may be exploited to make meaningful capacitance measurements, especially at small tip-surface separations, and demonstrate the potential of this technique for quantitative dopant profiling in semiconductors.

Subject Keywords

Amplitude oscillation, Electrostatic force, AFM

URI

https://hdl.handle.net/11511/43089

Journal

Applied Surface Science

DOI

https://doi.org/10.1016/s0169-4332(99)00565-6

Collections

Department of Physics, Article

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Citation Formats

S. JEFFERY, A. Oral, and J. B. Pethica, “Quantitative electrostatic force measurement in AFM,” Applied Surface Science, pp. 280–284, 2000, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/43089.