Integrated Temperature Sensor for Temperature Compensation of Inertial Sensors

2019-01-01
This study reports a novel dual-resonator integrated temperature sensor for temperature compensation on inertial sensors. The proposed temperature sensor eliminates the need of a TCXO or OCXO time base for accurate frequency-based temperature determination. Moreover, the sensor structure eliminates the effects of aging related shifts of the nominal frequency of counter reference. In addition, it is capable of short-term error mitigation, improving bias stability of MEMS based inertial sensors.
Citation Formats
O. Kaya, T. Kose, and K. Azgın, “Integrated Temperature Sensor for Temperature Compensation of Inertial Sensors,” 2019, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/44727.