Integrated Temperature Sensor for Temperature Compensation of Inertial Sensors

Date

2019-01-01

Author

Kaya, Onurcan
Azgın, Kıvanç

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This study reports a novel dual-resonator integrated temperature sensor for temperature compensation on inertial sensors. The proposed temperature sensor eliminates the need of a TCXO or OCXO time base for accurate frequency-based temperature determination. Moreover, the sensor structure eliminates the effects of aging related shifts of the nominal frequency of counter reference. In addition, it is capable of short-term error mitigation, improving bias stability of MEMS based inertial sensors.

Subject Keywords

Temperature compensation, DETF, MEMS resonator, Time base

URI

https://hdl.handle.net/11511/44727

DOI

https://doi.org/10.1109/isiss.2019.8739559

Collections

Department of Mechanical Engineering, Conference / Seminar

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Citation Formats

O. Kaya and K. Azgın, “Integrated Temperature Sensor for Temperature Compensation of Inertial Sensors,” 2019, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/44727.