Integrated Temperature Sensor for Temperature Compensation of Inertial Sensors

This study reports a novel dual-resonator integrated temperature sensor for temperature compensation on inertial sensors. The proposed temperature sensor eliminates the need of a TCXO or OCXO time base for accurate frequency-based temperature determination. Moreover, the sensor structure eliminates the effects of aging related shifts of the nominal frequency of counter reference. In addition, it is capable of short-term error mitigation, improving bias stability of MEMS based inertial sensors.


Temperature compensation of a capacitive mems accelerometer by using a mems oscillator
Kose, Talha; Azgın, Kıvanç; Akın, Tayfun (2016-02-25)
This study reports a temperature compensation method for a capacitive MEMS accelerometer by using a MEMS double-ended-tuning-fork (DETF) resonator integrated with the accelerometer structure on the same die. The proposed method utilizes the frequency information of the clamped-clamped DETF resonator which is oscillating in a closed-loop operation. In order to compensate the temperature dependence of the accelerometer output, frequency drift of the DETF resonator against changing temperature is used, i. e., ...
MEMS resonant temperature sensing with variable coupling stiffness and improved sensitivity
Şimşek, Ertuğ; Azgın, Kıvanç; Yüce, Emre; Department of Micro and Nanotechnology (2020-10-23)
This thesis presents the design, modelling, fabrication and characterization of a resonance based MEMS temperature sensor with improved sensitivity. The temperature sensor is composed of an electrostatically coupled double ended-tuning fork (DETF) MEMS resonator. The sensor utilizes the thermal expansion coefficient difference of the materials to detect the temperature change. The design consists of 2 resonator tines where each of them has two capacitive plates on each side. The capacitive plates faci...
Metamaterial Sensor Applications Based on Broadside Coupled SRR and V Shaped Resonator Structures
EKMEKÇİ, EVREN; Sayan, Gönül (2011-07-08)
In this study, the use of broadside-coupled SRR (BC-SRR) metamaterial topology is suggested for pressure, temperature, humidity and concentration sensor applications. Also, the use of V-shaped resonator topology is suggested for pressure sensor application. The feasibility of such sensors are demonstrated by numerical simulations for microwave region under magnetic excitation.
A Dual-Resonator Temperature Sensing Approach With Time Base Error Suppression
Kaya, Onurcan; Azgın, Kıvanç (Institute of Electrical and Electronics Engineers (IEEE), 2020-01-15)
In this study we present a novel dual-resonator temperature sensor which can be embedded in other MEMS sensors for improved thermal compensation and on-the-run calibration. For accurate temperature measurements, the proposed method mitigates time base errors in frequency counting, eliminates the need for a highly accurate reference clock and can cancel out the effects of aging of the time base without using a calibration process. The sensor structure is composed of a strain amplifying beam and two Double En...
Metamaterial Inspired Electrically Small GSM Antenna with Steerable Radiation Patterns and High Radiation Efficiency
Türkmen. Öznur; Sayan, Gönül; ZİOLKOWSKİ, RW (2013-07-13)
In this study, metamaterial inspired, electrically small, single band antennas with steerable radiation patterns and high radiation efficiencies are proposed. Three different antenna structures having their maximum directivities in the vertical (Antenna A), diagonal (Antenna B) and horizontal (Antenna C) directions are presented and their simulated performance characteristics are reported. These antennas, which consist of a coax-fed printed monopole and a capacitively loaded loop (CLL) as a near-field reson...
Citation Formats
O. Kaya and K. Azgın, “Integrated Temperature Sensor for Temperature Compensation of Inertial Sensors,” 2019, Accessed: 00, 2020. [Online]. Available: