Bor nitrür üretimi

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2008

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Özbelge, Önder H.
Katırcıoğlu, Bayram
Atılgan, İsmail
Özkol, Engin
Anutgan, Tamila Aliyeva
Anutgan, Mustafa

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Bor nitrür, grafite çok benzer altıgen (h-BN) yapıda tabakalar halinde veya kübik yapıda (k- BN) elmasa çok yakın özelliklerde bulunabilir. k-BN bilinen malzemeler içinde elmastan sonra en sert olduğundan malzeme endüstrisinde sert metal kaplamalar yapmada (elmastan daha üstün özelliklerde, metal işlemede) kullanılmaktadır. Ayrıca, elmas sadece p-türü katkılanabildiği halde, k-BN hem p hem de n türü katkılanabilmektedir, ve dolayısıyla elektronik devrelerin yapı taşı olan p-n eklemini üretmek olası olduğundan mor-mavi ışık bölgesinde ışık algılayıcısı (detektör) ve yayınlayıcısı (LED) uygulamasına açıktır. k-BN tabanlı bu devre elemanlarının, opto-elektronik yatkınlıkları yanında, elmastan daha yüksek bir yasak enerji aralığına sahip olmalarından dolayı çok daha yüksek sıcaklık ortamlarında kullanılmalarını sağlanabilir. Son yıllarda yapılan araştırmalar k-BN’nin plazma ortamında Fiziksel Buhar Biriktirme (FBB) veya Kimyasal Buhar Biriktirme (KBB) yöntemleri ile üretilebileceğini göstermiştir. Ancak bu çalışmalar biriktirilen maddenin özelliklerine (k-BN içeriği ve mekanik gerilim) ve birikme hızına etki eden üretim parametrelerinin (kullanılan bor ve azot kaynakları, kullanılan gaz kompozisyonu, kaplanan yüzeyi oluşturan madde(taban), uygulanan plazma yoğunluğu, RF gücü, bias voltaj, taban sıcaklığı) nasıl etki ettiğini sistematik bir yaklaşımla incelememiştir. Elde, çevre birimleriyle birlikte, kurulu bulunan hem FBB, hem de KBB düzenekleriyle (yapılabilir bazı değişiklikler ve eklerle), yukarıda sözü edilen sistematik çalışma olanaklar çerçevesinde gerçekleştirilmiştir. Başka bir deyişle hem RF hem de MW kullanan KBB ve magnetron çığlama kullanan KBB teknikleriyle büyütülen filmler, eldeki ve proje bütçesiyle sağlanan olan ölçüm/test düzenekleriyle çözümlenmiştir. Böylece üretim test döngüsü yinelenerek hedeflenen mekanik ve opto-elektronik özellikte k-BN ince filmleri ve ondan üretilebilecek yapıları oluşturan en uygun üretim koşulları belirlenmeye çalışılmıştır.

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https://app.trdizin.gov.tr/publication/project/detail/T0RNeU9EZz0
https://hdl.handle.net/11511/49487

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Department of Chemical Engineering, Project and Design

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Citation Formats

Ö. H. Özbelge, B. Katırcıoğlu, İ. Atılgan, E. Özkol, T. A. Anutgan, and M. Anutgan, “Bor nitrür üretimi,” 2008. Accessed: 00, 2020. [Online]. Available: https://app.trdizin.gov.tr/publication/project/detail/T0RNeU9EZz0.