A Lorentz force MEMS magnetometer

Pala, Sedat
Cicek, Meltem
Azgın, Kıvanç
This paper presents a Lorentz force magnetometer with a MEMS resonator structure as a sensor. Magnetometer composed of a resonator and a grill structure. The grill structure reduces the heat generation due to the current required to generate the Lorentz force. The proposed sensor is produced with standard SOI micromachining processes with device layer thickness of 35 mu m. The natural frequency of resonator is around 83 kHz, Q-factor of 1870 at around 40 mTorr ambient pressure. Tests are done for 1.12 mT magnetic field in the direction of normal to the resonator plane supplied by a Maxwell coil. The scale factor of the magnetometer is measured to be 5400 Hz/T. Comparing with similar resonators and given that the Lorentz force is linearly proportional to magnetic field with constant current and wire length, the resolution and bias instability are calculated to be 4.2 mu T/Hz(1/2) and 280 nT, respectively.


A single mass two-axis capacitive MEMS accelerometer with force rebalance
Köse, Talha; Terzioʇlu, Yunus; Azgın, Kıvanç; Akın, Tayfun (2015-03-26)
This paper presents a single mass 2-axis MEMS capacitive accelerometer with a unique force rebalance method achieved with the readout circuit developed for the simultaneous 2-axis acceleration sensing. Using a single mass structure with extra fingers for reading multiple axes allows better sensor performances when compared to multi-axis accelerometers with individual proof masses occupying the same die area. Test results show 274 mV/g scale factor for x-axis, and 280 mV/g scale factor for y-axis, while the ...
A CMOS n-well microbolometer FPA with temperature coefficient enhancement circuitry
Eminoglu, S; Tezcan, DS; Akın, Tayfun (2001-04-20)
This paper reports the development of a low-cost CMOS microbolometer focal plane array with a new temperature coefficient enhancement readout circuit. We have recently reported an uncooled microbolometer detector that uses the CMOS n-well layer as the active material, where the suspended and thermally isolated n-well structure is obtained by silicon bulk micromachining of fabricated CMOS dies. In addition, we have successfully fabricated a 16x16 n-well microbolometer FPA. Although n-well is single crystal s...
Design, fabrication, and characterization of micro thermal actuators
Gülcüler, Buğrahan; Azgın, Kıvanç; Department of Mechanical Engineering (2020-11)
This thesis presents the design, fabrication, and characterization of V-Type thermal actuators, which will be used in an actuator system that is planned to be a tensile and compressive test setup to characterize the expandible cells by the help of double- ended tuning fork resonators as a force sensing mechanism. Actuators are serially packed to increase the generated force by them while maintaining the same deflection values. They have been connected to the overall system by springs to create a force on te...
A single-mass self-resonating closed-loop capacitive MEMS accelerometer
Kose, Talha; Terzioglu, Yunus; Azgın, Kıvanç; Akın, Tayfun (2016-11-02)
This paper presents a single-axis, self-resonating accelerometer. The presented accelerometer incorporates a resonating sensing element which is used along with a closed-loop self-resonance circuit, and the analog force-feedback readout circuit. During operation, the sensing element is oscillated at its fundamental frequency through dedicated actuation electrodes in closed-loop configuration. This oscillation is used to modulate the capacitance difference between another set of differential electrodes which...
A high-performance silicon-on-insulator MEMS gyroscope operating at atmospheric pressure
Alper, Said Emre; Azgın, Kıvanç; Akın, Tayfun (Elsevier BV, 2007-03-30)
This paper presents a new, high-performance silicon-on-insulator (SOI) MEMS gyroscope with decoupled oscillation modes. The gyroscope structure allows it to achieve matched-resonance-frequencies, large drive-mode oscillation amplitude, high sense-mode quality factor, and low mechanical cross-talk. The gyroscope is fabricated through the commercially available SOIMUMPS process of MEMSCAP Inc. The fabricated gyroscope has minimum capacitive sense gaps of 2.6 mu m and a structural silicon thickness of 25 mu m,...
Citation Formats
S. Pala, M. Cicek, and K. Azgın, “A Lorentz force MEMS magnetometer,” 2016, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/52675.