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SILICON MICROMACHINING AND MICROFABRICATION TECHNIQUES FOR INTEGRATED SENSOR AND ACTUATOR SYSTEMS
Date
1994-04-14
Author
Akın, Tayfun
Metadata
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Subject Keywords
Automation & Control Systems
,
Computer Science, Artificial Intelligence
,
Engineering, Electrical & Electronic
,
Telecommunications
URI
https://hdl.handle.net/11511/52762
Conference Name
7th Mediterranean Electrotechnical Conference (MeleCON 94)
Collections
Department of Electrical and Electronics Engineering, Conference / Seminar
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T. Akın, “SILICON MICROMACHINING AND MICROFABRICATION TECHNIQUES FOR INTEGRATED SENSOR AND ACTUATOR SYSTEMS,” presented at the 7th Mediterranean Electrotechnical Conference (MeleCON 94), ANTALYA, TURKEY, 1994, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/52762.