A multi-step electromechanical Sigma Delta converter for micro-g capacitive accelerometers

Date

2003-01-01

Author

Külah, Haluk
Yazdi, N
Najafi, K

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A multi-step electromechanical /spl Sigma//spl Delta/ modulator for /spl mu/g accelerometers is described. A two-element sensor array is used in two /spl Sigma//spl Delta/ loops and resolution improves by >2x compared to a conventional 2nd-order /spl Sigma//spl Delta/ modulator. This CMOS chip operates at 1 MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW

URI

https://hdl.handle.net/11511/52994

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

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Citation Formats

H. Külah, N. Yazdi, and K. Najafi, “A multi-step electromechanical Sigma Delta converter for micro-g capacitive accelerometers,” 2003, vol. 46, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/52994.