A hybrid silicon microaccelerometer system with CMOS interface circuit

2000-01-01
Salian, A
Külah, Haluk
Yazdi, N
He, GH
Najafi, K
This paper presents a hybrid microaccelerometer subsystem consisting of an all-silicon pg capacitive microaccelerometer and a low noise CMOS capacitive interface circuit. This accelerometer has a measured sensitivity of 1.4 muF/g for a device with 2mm a lmm proof mass and 1.4pm air gap. The calculated mechanical noise floor for the device is 0.39 mug/vHz in atmosphere. The circuit has a 95dB dynamic range; a low offset of 370 muV and can resolve better than 75aF. The overall sensitivity of the complete module is measured as 160mV/g with a noise floor of 3.6 muV/vRz (-110dBV/vHz), indicating that the current system is capable of resolving about 20 mug/vHz.
43rd IEEE Midwest Symposium on Circuits and Systems

Suggestions

A CMOS switched-capacitor interface circuit for an integrated accelerometer
Külah, Haluk; Najafi, K (2000-01-01)
This paper presents a CMOS interface electronics for monolithic micromachined capacitive accelerometer systems. The interface electronics is a fully differential switched-capacitor charge integrator with its internal clock generator and sensor feedback circuit for closed-loop operation. The circuit is designed for open-loop and closed-loop operations, and provides both digital and differential analog outputs. One of the main advantages of this chip is that it can be monolithically integrated with the sensor...
A Low-power capacitive integrated CMOS readout circuitry for high performance MEMS accelerometers
İncedere, Osman Samet; Akın, Tayfun; Eminoğlu, Selim; Department of Electrical and Electronics Engineering (2013)
This thesis presents a low power capacitive integrated CMOS readout circuitry for high performance MEMS accelerometers. It proposes a linearized model of the complete closed loop accelerometer system, which makes easier of designing and analyzing the system. Designed readout circuitry offers low noise, wide dynamic range and high linearity system with very low power consumption. Designed readout circuit includes proportional integral (PI) controller circuit, which significantly decreases the proof mass defl...
A wireless implantable multichannel digital neural recording system for a micromachined sieve electrode
Akın, Tayfun; Bradley, R.M. (Institute of Electrical and Electronics Engineers (IEEE), 1998)
This paper reports the development of an implantable, fully integrated, multichannel peripheral neural recording system, which is powered and controlled using an RF telemetry link, The system allows recording of +/-500 mu V neural signals from axons regenerated through a micromachined silicon sieve electrode, These signals are amplified using on-chip 100 Hz to 3.1 kHz bandlimited amplifiers, multiplexed, and digitized with a low-power (<2 mW), moderate speed (8 mu s/b) current-mode 8-b analog-to-digital con...
Fabrication of A Sandwich Type Three Axis Capacitive MEMS Accelerometer
Tez, Serdar; Akın, Tayfun (2013-11-06)
This paper presents a three axis capacitive MEMS accelerometer including individual lateral and vertical accelerometers in a same die. The three axis capacitive MEMS accelerometer is fabricated by utilizing a glass-silicon-glass multi-stack formed by a fabrication process depending on the double glass modified silicon on glass process (DGM-SOG), where the structural layer is selected to be 35 mu m thick silicon. The fabrication process uses the Au-Si eutectic bonding in the last step of the formation of th...
A Low-power memory CMOS integrated circuit for image sensors
Üstündağ, Mithat Cem Boreyda; Akın, Tayfun; Department of Electrical and Electronics Engineering (2015)
This thesis presents a low power SRAM block implemented in a 0.35 μm CMOS technology for imaging applications to be used inside a digital image processor ASIC (Application Specific Integrated Circuit). The SRAM structure is designed to be fast enough to store all the image data fed by a large format readout circuitry such as VGA (640x512), while requiring low power consumption. The low power consumption is a very critical requirement of such circuit, as the circuit will eventually be used in an embedded pla...
Citation Formats
A. Salian, H. Külah, N. Yazdi, G. He, and K. Najafi, “A hybrid silicon microaccelerometer system with CMOS interface circuit,” presented at the 43rd IEEE Midwest Symposium on Circuits and Systems, Lansing, MI, USA, 2000, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/53000.