Analytical calculation of collapse voltage of CMUT membrane

Date

2004-01-01

Author

Nikoozadeh, A
Bayram, Barış
Yaralioglu, GG
Khuri-Yakub, BT

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Because the collapse voltage determines the operating point of the capacitive micromachined ultrasonic transducer (CMUT), it is crucial to calculate and control this parameter. One approach uses parallel plate approximation, where a parallel plate motion models the average membrane displacement. This usually yields calculated collapse voltage 25 percent higher than the actual collapse voltage. More accurate calculation involves finite element method (FEM) analysis. However, depending on the required accuracy, the computation time may require many hours.

Subject Keywords

Capacitive micromachined ultrasonic transducer, CMUT, Collapse voltage

URI

https://hdl.handle.net/11511/53858

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

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Citation Formats

A. Nikoozadeh, B. Bayram, G. Yaralioglu, and B. Khuri-Yakub, “Analytical calculation of collapse voltage of CMUT membrane,” 2004, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/53858.