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Analytical calculation of collapse voltage of CMUT membrane

Nikoozadeh, A
Bayram, Barış
Yaralioglu, GG
Khuri-Yakub, BT
Because the collapse voltage determines the operating point of the capacitive micromachined ultrasonic transducer (CMUT), it is crucial to calculate and control this parameter. One approach uses parallel plate approximation, where a parallel plate motion models the average membrane displacement. This usually yields calculated collapse voltage 25 percent higher than the actual collapse voltage. More accurate calculation involves finite element method (FEM) analysis. However, depending on the required accuracy, the computation time may require many hours.