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Experimental characterization of collapse-mode CMUT operation
Date
2006-08-01
Author
Oralkan, Omer
Bayram, Barış
Yaralioglu, Goksen G.
Ergun, A. Sanli
Kupnik, Mario
Yeh, David T.
Wygant, Ira O.
Khuri-Yakub, Butrus T.
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Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
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This paper reports on the experimental characterization of collapse-mode operation of capacitive micromachined ultrasonic transducers (CMUTs). CMUTs are conventionally operated by applying a direct current (DC) bias voltage less than the collapse voltage of the membrane, so that the membrane is deflected toward the bottom electrode. In the conventional regime, there is no contact between the membrane and the substrate; the maximum alternating current (AC) displacement occurs at the center of the membrane. In collapse-mode operation, the DC bias voltage is first increased beyond the collapse voltage, then reduced without releasing the collapsed membrane. In collapse-mode operation, the center of the membrane is always in contact with the substrate. In the case of a circular membrane, the maximum AC displacement occurs along the ring formed between the center and the edge of the membrane.
Subject Keywords
Micromachined ultrasonic transducers
,
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URI
https://hdl.handle.net/11511/56758
Journal
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
DOI
https://doi.org/10.1109/tuffc.2006.1665109
Collections
Department of Electrical and Electronics Engineering, Article
Citation Formats
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BibTeX
O. Oralkan et al., “Experimental characterization of collapse-mode CMUT operation,”
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
, vol. 53, no. 8, pp. 1513–1523, 2006, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/56758.