Physical Stability Analysis for Optical MEMS Phase Shifters

Date

2018-10-04

Author

Ozer, Yigit
Kocaman, Serdar

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Stability and switching performance of light force driven opto-mechanical phase shifters are examined and a formula determining the stability condition has been proposed for various structures. The analysis showed that cantilever beams are inadequate to generate 180 phase difference.

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https://hdl.handle.net/11511/54788

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Department of Electrical and Electronics Engineering, Conference / Seminar

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Citation Formats

Y. Ozer and S. Kocaman, “Physical Stability Analysis for Optical MEMS Phase Shifters,” 2018, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/54788.