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A MEMS BASED GRAVIMETRIC RESONATOR FOR MASS SENSING APPLICATIONS
Date
2011-01-27
Author
Bayraktar, Ekrem
Eroglu, Deniz
Ciftlik, Ata Tuna
Külah, Haluk
Metadata
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This paper presents the design and implementation of a resonator-type high-resolution gravimetric sensor, which allows detection in liquid media without severe degradation of the quality factor and the resolution. The proposed system eliminates the drawbacks of traditional cantilever-based detectors by lateral motion of the mechanical structure, which significantly decreases squeeze-film damping. It has been experimentally verified that the system is capable of achieving 5.91 fg/Hz mass sensitivity by measuring the mass of a single 3 mu m diameter polystyrene bead bound on the proof mass surface.
URI
https://hdl.handle.net/11511/55044
Conference Name
24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Collections
Department of Electrical and Electronics Engineering, Conference / Seminar
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E. Bayraktar, D. Eroglu, A. T. Ciftlik, and H. Külah, “A MEMS BASED GRAVIMETRIC RESONATOR FOR MASS SENSING APPLICATIONS,” presented at the 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Cancun, MEXICO, 2011, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/55044.