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A MEMS BASED GRAVIMETRIC RESONATOR FOR MASS SENSING APPLICATIONS

2011-01-27
Bayraktar, Ekrem
Eroglu, Deniz
Ciftlik, Ata Tuna
Külah, Haluk
This paper presents the design and implementation of a resonator-type high-resolution gravimetric sensor, which allows detection in liquid media without severe degradation of the quality factor and the resolution. The proposed system eliminates the drawbacks of traditional cantilever-based detectors by lateral motion of the mechanical structure, which significantly decreases squeeze-film damping. It has been experimentally verified that the system is capable of achieving 5.91 fg/Hz mass sensitivity by measuring the mass of a single 3 mu m diameter polystyrene bead bound on the proof mass surface.