A MEMS BASED GRAVIMETRIC RESONATOR FOR MASS SENSING APPLICATIONS

2011-01-27
Bayraktar, Ekrem
Eroglu, Deniz
Ciftlik, Ata Tuna
Külah, Haluk
This paper presents the design and implementation of a resonator-type high-resolution gravimetric sensor, which allows detection in liquid media without severe degradation of the quality factor and the resolution. The proposed system eliminates the drawbacks of traditional cantilever-based detectors by lateral motion of the mechanical structure, which significantly decreases squeeze-film damping. It has been experimentally verified that the system is capable of achieving 5.91 fg/Hz mass sensitivity by measuring the mass of a single 3 mu m diameter polystyrene bead bound on the proof mass surface.
Citation Formats
E. Bayraktar, D. Eroglu, A. T. Ciftlik, and H. Külah, “A MEMS BASED GRAVIMETRIC RESONATOR FOR MASS SENSING APPLICATIONS,” presented at the 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Cancun, MEXICO, 2011, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/55044.