A MEMS BASED GRAVIMETRIC RESONATOR FOR MASS SENSING APPLICATIONS

2011-01-27
Bayraktar, Ekrem
Eroglu, Deniz
Ciftlik, Ata Tuna
Külah, Haluk
This paper presents the design and implementation of a resonator-type high-resolution gravimetric sensor, which allows detection in liquid media without severe degradation of the quality factor and the resolution. The proposed system eliminates the drawbacks of traditional cantilever-based detectors by lateral motion of the mechanical structure, which significantly decreases squeeze-film damping. It has been experimentally verified that the system is capable of achieving 5.91 fg/Hz mass sensitivity by measuring the mass of a single 3 mu m diameter polystyrene bead bound on the proof mass surface.
24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Suggestions

A low-cost small pixel uncooled infrared detector for large focal plane arrays using a standard CMOS process
Eminoglu, S; Tanrikulu, MY; Tezcan, DS; Akın, Tayfun (2002-04-03)
This paper reports the development of a low-cost, small pixel uncooled infrared detector using a standard CMOS process. The detector is based on a suspended and thermally isolated p(+)-active/n-well diode whose forward voltage changes due to an increase in the pixel temperature with absorbed infrared radiation. The detector is obtained with simple post-CMOS etching steps on dies fabricated using a standard n-well CMOS process. The post-CMOS process steps are achieved without needing any deposition or lithog...
A High Throughput Lab-On-A-Chip System for Label Free Quantification of Breast Cancer Cells under Continuous Flow
ASLAN, MUSTAFA YASİN; Yalçın, Yasemin; Ozgur, E.; Gündüz, Ufuk; Eminoglu, S.; Külah, Haluk; Akın, Tayfun (Elsevier BV; 2016-05-27)
This paper presents an LOC system combining microfluidic DEP channel with a CMOS image sensor for label and lens free detection and real-time counting of MCF-7 cells under continuous flow. Trapped and then released MCF-7 cells are accurately detected and counted under flow with a CMOS image sensor integrated underneath the DEP channel, for the first time in the literature. CMOS image sensor can capture 391 frames per second (fps) that allows detection of the released cells flowing through the channel with a...
A laterally resonating gravimetric sensor with uniform mass sensitivity and high linearity
Eroglu, D.; Bayraktar, E.; Külah, Haluk (2011-09-01)
In this paper, a laterally resonating gravimetric sensor with high linearity and uniform mass sensitivity is presented for biochemical sensor applications including rare-cell detection. The sensor utilizes symmetrically placed, balanced, folded spring beam structures to ensure lateral motion of the proof mass and limit the displacement difference between the proof mass center and edges. The dynamic mass sensitivity range of the resonator is increased by using the above mentioned properties of the resonators...
A Miniature Low-Cost LWIR Camera with a 160x120 Microbolometer FPA
Tepegoz, Murat; Kucukkomurler, Alper; Tankut, Firat; Eminoglu, Selim; Akın, Tayfun (2014-05-08)
This paper presents the development of a miniature LWIR thermal camera, MSE070D, which targets value performance infrared imaging applications, where a 160x120 CMOS-based microbolometer FPA is utilized. MSE070D features a universal USB interface that can communicate with computers and some particular mobile devices in the market. In addition, it offers high flexibility and mobility with the help of its USB powered nature, eliminating the need for any external power source, thanks to its low-power requiremen...
A Transformation Media Based Approach for Efficient Monte Carlo Analysis of Scattering From Rough Surfaces With Objects
Ozgun, Ozlem; Kuzuoğlu, Mustafa (2013-03-01)
This paper presents a computational model that utilizes transformation-based metamaterials to enhance the performance of numerical modeling methods for achieving the statistical characterization of two-dimensional electromagnetic scattering from objects on or above one-dimensional rough sea surfaces. Monte Carlo simulation of the rough surface scattering problem by means of differential equation-based finite methods (such as finite element or finite difference methods) usually places a heavy burden on compu...
Citation Formats
E. Bayraktar, D. Eroglu, A. T. Ciftlik, and H. Külah, “A MEMS BASED GRAVIMETRIC RESONATOR FOR MASS SENSING APPLICATIONS,” presented at the 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Cancun, MEXICO, 2011, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/55044.