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Capacitive micromachined ultrasonic transducer arrays for integrated diagnostic/therapeutic catheters

Wong, Serena H.
Wygant, Ira O.
Yeh, David T.
Zhuang, Xuefeng
Bayram, Barış
Kupnik, Mario
Oralkan, Omer
Ergun, A. Sanli
Yaralioglu, Goksen G.
Khuri-Yakub, Butrus T.
In recent years, medical procedures have become increasingly non-invasive. These include endoscopic procedures and intracardiac interventions (e.g., pulmonary vein isolation for treatment of atrial fibrillation and plaque ablation for treatment of arteriosclerosis). However, current tools suffer from poor visualization and difficult coordination of multiple therapeutic and imaging devices. Dual-mode (imaging and therapeutic) ultrasound arrays provide a solution to these challenges. A dual-mode transducer can provide focused, noncontact ultrasound suitable for therapy and can be used to provide high quality real-time images for navigation and monitoring of the procedure. In the last decade, capacitive micromachined ultrasonic transducers (CMUTs), have become an attractive option for ultrasonic imaging systems due to their fabrication flexibility, improved bandwidth, and integration with electronics. The CMUT's potential in therapeutic applications has also been demonstrated by surface output pressures as high as 1 MPa peak to peak and continuous wave (CW) operation. This paper reviews existing interventional CMUT arrays, demonstrates the feasibility of CMUTs for high intensity focused ultrasound (HIFU), and presents a design for the next-generation CMUTs for integrated imaging and HIFU endoscopic catheters.