Finite element modeling of capacitive micromachined ultrasonic transducers

Date

2005-01-01

Author

Yaralioglu, GG
Bayram, Barış
Nikoozadeh, A
Khuri-Yakub, BTP

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

170
views

0
downloads

Transducers based on piezoelectric crystals dominate the biomedical ultrasonic imaging field. However, fabrication difficulties for piezoelectric transducers limit their usage for complex imaging modalities such as 2D imaging, high frequency imaging, and forward looking intravascular imaging. Capacitive micromachined ultrasonic transducers (CMUTs) have been proposed to overcome these limitations and they offer competitive advantages in terms of bandwidth and dynamic range. Further, the ease of fabrication enables manufacturing of complex array geometries. A CMUT transducer is composed of many electrostatically actuated membranes. Earlier analysis of these devices concentrated on an equivalent circuit approach, which assumed the motion of the membrane was approximated by a parallel plate capacitor. Finite element analysis is required for more accurate results. In this paper, we present the finite element model developed to evaluate the performance of the CMUTs. The model is composed of a membrane radiating into immersion medium. Electrostatic actuation is added on using electromechanical elements. Symmetry boundary conditions are imposed around the sidewalls of the finite element mesh, so that the model reflects the properties of a cell driven with the same phase as its neighboring membranes in an infinitely large array. Absorbing boundaries are implemented one wavelength away from the membrane to avoid reflections from the end of the finite element mesh. Using the model, we optimized the membrane radius, membrane thickness and gap height. Our optimized designed yielded a center frequency of 13 MHz with hundred percent bandwidth. A maximum output pressure of 20 kPascal per volt was obtained.

Subject Keywords

Fnite element analysis (FEA), Capacitive micromachined ultrasonic transducer (CMUT)

URI

https://hdl.handle.net/11511/57007

DOI

https://doi.org/10.1117/12.595619

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

Suggestions

OpenMETU
Core

Finite element modeling of micro particle separation using ultrasonic standing waves Süleyman, Büyükkoçak; Çetin, Barbaros; Özer, Mehmet Bülent (2014-08-07) Acoustophoresis which means separation of particles and cells using acoustic waves is becoming an intensive research subject. The method is based on inducing an ultrasonic compression standing wave inside a microchannel. A finite element approach is used to model the acoustic and electro-mechanical behavior of the piezoelectric material, the micro-channel geometry as well as the fluid inside the channel. The choices of silicon and PDMS materials are investigated as the chip materials for the resonator. A se...
FINITE ELEMENT ANALYSIS OF FABRICATION RELATED THERMAL EFFECTS IN CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS Kupnik, Mario; Ergun, Arif S.; Yaralioglu, Goksen G.; Bayram, Barış; Oralkan, Oemer; Wong, Serena H.; Lin, Dersong; Khuri-Yakub, Butrus T. (2006-01-01) The accurate prediction of the static operation point of capacitive micromachined ultrasonic transducer (CMUT) membranes is essential for dynamic performance modeling, device design, and device fabrication. We evaluate whether fabrication-related stress effects in CMUT cells cause significant deviations observed between membrane deflection measurements and calculations. Our finite element analysis (FEA) considers the thermal structural interaction associated with the temperature stress history during device...
Finite element analysis of strength characteristics of various resin based restorative materials in Class V cavities Yaman, SD; Şahin, Melin; Aydin, C (Wiley, 2003-06-01) This study investigated the strength characteristics of various composites (Tetric Ceram, Tetric Flow, Prisma AP.H, Synergy Duo Shade, Synergy Compact, and Z 100) and compomers (Compoglass, Compoglass F, Dyract AP, F 2000) that were applied in a Class V cavity of a maxillary central incisor. The study was conducted by using a 3-dimensional finite element approach and in the study ansys package program was used. The tooth model had 294 elements and 420 nodes. The teeth considered were assumed to be subjected...
Finite element analysis and tests of composite beams with fiber bragg grating sensors under torsional load for structural health monitoring applications Karataş, Cansu; Yaman, Yavuz; Department of Aerospace Engineering (2017) In this thesis, feasibility of Fiber Bragg Grating sensors for Structural Health Monitoring applications of composite structures is studied. The method and essentials for the manufacturing process of composite beams with embedded Fiber Bragg Grating sensors are presented. Composite beams instrumented with surface bonded and embedded Fiber Bragg Grating sensors are tested under static torsional load. In addition, Finite Element Analyses of composite beams under torsional load is conducted using the commercia...
Finite Element Modelling of TBC Failure Mechanisms by Using XFEM and CZM Bostanci, Safa Mesut; Gürses, Ercan; Çöker, Demirkan (Elsevier BV; 2019-01-01) Thermal Barrier Coatings have been widely used in modern turbine engines to protect the nickel based metal substrate from the high temperature service conditions, 1600-1800 K. In this study, failure mechanisms of typical Air Plasma Sprayed Thermal Barrier Coatings (TBC) used in after-burner structures composed of three major layers: Inconel 718 substrate, NiCrAlY based metallic bond coat (BC) and Yttria Stabilized Zirconia (YSZ) based ceramic top coat (TC) are investigated. Investigation of the cracking mec...

Citation Formats

G. Yaralioglu, B. Bayram, A. Nikoozadeh, and B. Khuri-Yakub, “Finite element modeling of capacitive micromachined ultrasonic transducers,” 2005, vol. 5750, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/57007.