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Characterization of TiO2 thin films prepared by sol-gel processing
Date
2004-01-01
Author
Özenbaş, Ahmet Macit
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In this work, TiO2 thin films were prepared by using sol-gel processing on soda-lime glass and silicon substrates. Precursor solutions for TiO2 films were prepared by using the proper amounts of titaniumtetraisopropoxide, diethanolamine and ethanol. The thickness of the TiO2 films was adjusted by repeating the spin coating cycle before the final heat treatment. Finally, various amounts of polyethylene glycol (PEG) were added to the above solution to observe its effect on the film morphology. The electrical characteristics were determined by using C-V measurements and respective dielectric constants were calculated. Results indicate that capacitance and the dielectric constant values of TiO2 films were comparable with the literature results and for 2.7 μm film thickness, dielectric constant was 24.
Subject Keywords
Photocatalysis
,
TiO2 thin films
,
Sol-gel processing
URI
https://hdl.handle.net/11511/62646
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=8644282087&origin=inward
Journal
EURO CERAMICS VIII, PTS 1-3
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Department of Metallurgical and Materials Engineering, Article
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Characterization of TiO2 thin films prepared by sol-gel processing
Özenbaş, Ahmet Macit (2004-01-01)
In this work, TiO2 thin films were prepared by using sol-gel processing on soda-lime glass and silicon substrates. Precursor solutions for TiO2 films were prepared by using the proper amounts of titaniumtetraisopropoxide, diethanolamine and ethanol. The thickness of the TiO2 films was adjusted by repeating the spin coating cycle before the final heat treatment. Finally, various amounts of polyethylene glycol (PEG) were added to the above solution to observe its effect on the film morphology. The electrical ...
Characterization and preparation of thin films and homogeneously precipitated Pb(Zr,Ti)O3 powders Homojen olarak çökelti̇lmi̇ş Pb(Zr,Ti)O3 tozlarin ve i̇nce fi̇lmleri̇n hazirlanmasi ve karakteri̇zasyonu
Özenbaş, Ahmet Macit (1999-12-01)
In this study, ferroelectric Pb(Zr,Ti)O3 powders and thin films were prepared from metal chlorides using sol-gel processing method. For powders; homogeneous precipitation from aqueous solution and for films; dip coating just before precipitation was applied in the presence of urea, [(NH2)2CO]. Characterization of the films and powders were carried out primarily by XRD and SEM/EDX. Both the films and powders were stoichiometric and completely crystallized into perovskite phase after annealing for 5 hours at ...
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Karakuşçu, Aylin; Özenbaş, Ahmet Macit; Department of Metallurgical and Materials Engineering (2006)
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Preparation of lead free BZT-BCT thin films by chemical solution deposition and their characterization
Çeltikçi, Barış; Özenbaş, Ahmet Macit; Department of Metallurgical and Materials Engineering (2012)
In the presented thesis, lead-free Ba(Ti0.8Zr0.2)O3-(Ba0.7Ca0.3)TiO3 (BZT-BCT) thin films were deposited on Pt/TiO2/SiO2/Si substrates using chemical solution deposition method and then the effect of process parameters were investigated to obtain optimum parameters of these lead-free thin films. The phase was selected near to the morphotropic phase boundary (MPH) to increase the number of polarization directions where rhombohedral and tetragonal phases exist together. In this study, the effect of sintering ...
Synthesis of CNT-titania-silica nanocomposite thin films: the effect of heat treatment on photocatalytic activity
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In this study, CNT-TiO2-SiO2 nanocomposites were synthesized by sol-gel process and the thin films over glass substrates were fabricated by dip coating method. The effects of CNT addition, heat treatment temperature and atmospheres on the structure and photocatalytic properties were examined. The thin films were prepared with and without carbon nanotubes and the heat treatment was carried out at different temperatures in the range of 300-600oC under air and nitrogen atmosphere. Characterization of the sampl...
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A. M. Özenbaş, “Characterization of TiO2 thin films prepared by sol-gel processing,”
EURO CERAMICS VIII, PTS 1-3
, pp. 505–508, 2004, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/62646.