Ion implantation and deposition on the inner surfaces of cylinders by exploding metallic foils

Date

2000-10-01

Author

Demokan, O

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A novel scheme for ion deposition and possibly ion implantation on the inner surfaces of cylindrical targets is proposed and experimentally tested. A large current is passed through a coaxial table-type structure, composed of a straight conductor and a thin metallic foil, surrounding it. The foil evaporates and ionizes forming a metallic plasma, which is pushed radially outward due to the pressure of the magnetic field, confined to the region between the plasma and the conductor. The ions of the foil material are observed to be deposited uniformly on the inner surface of a cylindrical target, enclosing this structure coaxially. Auger analysis on the target implies a possible implantation as well, but this implication needs to be supported by further, extensive measurements, before a concrete statement can be made. The outcome of this pioneering experiment is far from being perfect, but is encouraging. Suggestions for improving the quality of the outcome are made for this promising, single-shot deposition procedure.

Subject Keywords

Arcs (Electric), İon implantation, Pinch effect, Plasma deposition, Plasma material processing

URI

https://hdl.handle.net/11511/63360

Journal

IEEE TRANSACTIONS ON PLASMA SCIENCE

DOI

https://doi.org/10.1109/27.901259

Collections

Department of Physics, Article

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Citation Formats

O. Demokan, “Ion implantation and deposition on the inner surfaces of cylinders by exploding metallic foils,” IEEE TRANSACTIONS ON PLASMA SCIENCE, pp. 1720–1724, 2000, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/63360.