Ion implantation in confined, pinching metallic plasmas

Date

1999-02-15

Author

Demokan, O
Marji, E

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

153
views

0
downloads

A series of preliminary experiments have been carried out to obtain a metallic arc discharge, in the form of an annular cylindrical column, carrying a current in the axial direction. To assert this geometry, a ring-shaped cathode is adopted and an arc formation is triggered by heating the cathode externally. The plasma, initially in the form of a cylindrical shell, is seen to be confined and pinched by its own magnetic field. The resulting, radially inward flux is observed to produce efficient and multidirectional implantation on targets placed near the axis, even without biasing. (C) 1999 American Institute of Physics. [S0021-8979(99)02204-5].

Subject Keywords

Vacuum-Arc

URI

https://hdl.handle.net/11511/65053

Journal

JOURNAL OF APPLIED PHYSICS

DOI

https://doi.org/10.1063/1.369506

Collections

Department of Physics, Article

Suggestions

OpenMETU
Core

Ion implantation and deposition on the inner surfaces of cylinders by exploding metallic foils Demokan, O (2000-10-01) A novel scheme for ion deposition and possibly ion implantation on the inner surfaces of cylindrical targets is proposed and experimentally tested. A large current is passed through a coaxial table-type structure, composed of a straight conductor and a thin metallic foil, surrounding it. The foil evaporates and ionizes forming a metallic plasma, which is pushed radially outward due to the pressure of the magnetic field, confined to the region between the plasma and the conductor. The ions of the foil materi...
Dielectric and photo-dielectric properties of TlGaSeS crystals Qasrawi, A. F.; Abu-Zaid, Samah F.; Ghanameh, Salam A.; Hasanlı, Nızamı (2014-05-01) The room temperature, dark and photo-dielectric properties of the novel crystals TlGaSeS are investigated in the frequency, intensity and biasing voltage having ranges of similar to 1-120 MHz, 14-40 klux and 0-1 V, respectively. The crystals are observed to exhibit a dark high frequency effective dielectric constant value of similar to 10.65 x 10(3) with a quality factor of similar to 8.84 x 10(4) at similar to 120 MHz. The dielectric spectra showed sharp resonance-antiresonance peaks in the frequency range...
Spectroscopic study and numerical simulation of low-pressure radio-frequency capacitive discharge with argon downstream Tanisli, Murat; Rafatov, İsmail; Sahin, Neslihan; Mertadam, Sercan; Demir, Suleyman (Canadian Science Publishing, 2017-02-01) In this study, the characteristic properties and plasma parameters of capacitive radio frequency (RF) argon (Ar) discharge and supplementary discharge at low pressure are investigated with optical emission spectroscopy (OES). The wavelengths of spectral lines from OES are obtained between 650-900 nm. Using OES lines and related experimental data, the electron temperatures for different RF power, flow, and measurement periods are determined. Eventually, the properties of plasma including the electron tempera...
Streamwise oscillations of a cylinder beneath a free surface: Free surface effects on fluid forces Kocabiyik, Serpil; Bozkaya, Canan (2015-11-01) A two-dimensional free surface flow past a circular cylinder forced to perform streamwise oscillations in the presence of an oncoming uniform flow is investigated at a Reynolds number of R=200 and fixed displacement amplitude, A=0.13, for the forcing frequency-to-natural shedding frequency ratios, f/f(0) = 1.5, 2.5, 3.5. The present two-fluid model is based on a velocity-pressure formulation of the two-dimensional continuity and unsteady Navier-Stokes equations. The continuity and Navier-Stokes equations ar...
RBF Solution of Incompressible MHD Convection Flow in a Pipe Gürbüz, Merve; Tezer, Münevver (2016-10-12) The steady convection flow of a viscous, incompressible and electrically conducting fluid is considered in a lid-driven cavity under the effect of a uniform horizontally applied magnetic field. The governing equations are the Navier-Stokes equations of fluid dynamics including buoyancy and Lorentz forces and the energy equation including Joule heating and viscous dissipation. These coupled equations are solved iteratively in terms of velocity components, stream function, vorticity, pressure and temperature ...

Citation Formats

O. Demokan and E. Marji, “Ion implantation in confined, pinching metallic plasmas,” JOURNAL OF APPLIED PHYSICS, pp. 2081–2084, 1999, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/65053.