Ion-matrix sheaths related to targets with grooves

Date

2002-05-01

Author

Demokan, O

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

5
views

0
downloads

In this work, the ion-matrix sheath near a target with a rectangular groove is studied analytically. A two-dimensional model with a single groove is adopted. The potential and electric-field profiles within the groove are analyzed to provide insight regarding the uniformity and efficiency of ion implantation on its walls. The deviation of the sheath edge from the planar geometry is also illustrated. (C) 2002 American Institute of Physics.

Subject Keywords

Cylindrical bore, Implantation, Thickness

URI

https://hdl.handle.net/11511/63897

Collections

Department of Physics, Article