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A multi step electromechanical converter for micro g capacitive accelerometers
Date
2003-06-13
Author
Külah, Haluk
Yazdi, N
Najafi, Khalil
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This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
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URI
https://hdl.handle.net/11511/69494
DOI
https://doi.org/10.1109/isscc.2003.1234267
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Department of Electrical and Electronics Engineering, Conference / Seminar
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H. Külah, N. Yazdi, and K. Najafi, “A multi step electromechanical converter for micro g capacitive accelerometers,” 2003, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/69494.