A New Micro fabrication Process Simulator for MEMS Designs

Date

2008-01-01

Author

YILDIRIM, ALPER
Dölen, Melik

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

137
views

0
downloads

This paper introduces a new process simulator for micro-electro-mechanical systems. The open-source program, which has been developed via C/C+ + language along with the OpenGL library functions, significantly speeds up the design phase by providing realistic outcomes about the micro-fabrication processes involved. While anisotropic/isotropic etching of silicon wafers are of major interest, the developed software can conveniently simulate additive micro-fabrication processes such as doping and material deposition by extending its basic cellular automaton algorithm. Equipped with an integrated mask design editor, complex mask patterns can be generated by the software. Consequently, the simulation on the subsequent micro-fabrication processes that employ these complex mask patterns can be carried out in the same integrated environment. The paper also shows that the simulation results are in agreement with the experimental ones both qualitatively and quantitatively.

URI

https://hdl.handle.net/11511/69631

Journal

International Journal of Design Engineering

DOI

https://doi.org/10.1504/ijde.2008.024787

Collections

Department of Mechanical Engineering, Article

Suggestions

OpenMETU
Core

A novel command generation method with variable feedrate utilizing FPGA for motor drives Yarnan, Ulas; Dölen, Melik; Koku, Ahmet Buğra (2010-07-09) This paper focuses on a novel command generator for servo-motor drives to be used as an integral part of their motion controllers. The method, which incorporates a new data compression algorithm, is capable of generating trajectory data at variable rates. In this paradigm, higher-order differences of a given trajectory (i.e. position) are first computed and thus the resulting data are compressed via the proposed technique. The generation of the commands is carried out according to the feedrate (i.e. the spe...
A Novel Command Generation Method with Variable Feedrate utilizing FGPA for Motor Drives Yaman, Ulaş; Dölen, Melik; Koku, Ahmet Buğra (2010-07-09) This paper focuses on a novel command generator for servo-motor drives to be used as an integral part of their motion controllers. The method, which incorporates a new data compression algorithm, is capable of generating trajectory data at variable rates. In this paradigm, higher-order differences of a given trajectory (i.e. position) are first computed and thus the resulting data are compressed via the proposed technique. The generation of the commands is carried out according to the feedrate (i.e. the spe...
A new approach to shutterless operation of microbolometer based infrared cameras Çavdar, Semih; Akın, Tayfun; Department of Electrical and Electronics Engineering (2021-2-03) This thesis presents an algorithm for the shutterless operation of microbolometer based infrared imaging systems. The active material of the microbolometer used in the thesis is vanadium oxide and it is produced in METU MEMS Center. The array size of the microbolometer is 480x640 and pixel pitch is 17 μm. The microbolometer has a CTIA type readout circuit which consists of detector and reference resistance. Voltage values are optimized at steady-state considering interactions between pixels in the focal pla...
A Turbine-Based MEMS Sensor for Spirometry With Wearable Devices Beyaz, Mustafa; Habibiabad, S.; Yildiz, H.; Goreke, U.; Azgın, Kıvanç (2019-10-01) This paper presents a turbine-based microelectromechanical systems (MEMS) sensor for spirometry application. The compact sensor dimensions allow integration into smart wearable devices for mobile spirometry without a dedicated hand-held component. The sensor is composed of a turbine with embedded magnets, which is surrounded by two stators with micro coils in a PMMA package. Tangential gas flow actuates the turbine on ball bearings and results in voltage generation due to electromagnetic induction. The sens...
A modified algorithm for peer-to-peer security Akleylek, Sedat; Emmungil, Levent; NURİYEV, URFAT (2007-01-01) In this paper we present the steganographic approach to peer-to-peer systems with a modified algorithm. This gives the user a very high level of protection against being compelled to disclose its contents. Even the realization of the quantum computer cannot solve NP-hard problem in a polynomial time, a modified algorithm with steganographic use depending on Knapsack problem may make peer-to-peer systems secure.

Citation Formats

A. YILDIRIM and M. Dölen, “A New Micro fabrication Process Simulator for MEMS Designs,” International Journal of Design Engineering, pp. 360–379, 2008, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/69631.