Self calibrating micro-fabricated load cells

2016-5-1
Lorenzo, Valdevit
Azgın, Kıvanç
Self calibrating micro-fabricated load cells are disclosed. According to one embodiment, a self calibrating load cell comprises a resonant double ended tuning fork force sensor and a phase locked loop circuit for detection of frequency changes upon external load application to the resonant double ended tuning fork force sensor.
Citation Formats
V. Lorenzo and K. Azgın, “Self calibrating micro-fabricated load cells,” 00, 2016.