Self calibrating micro-fabricated load cells

2016-5-1
Lorenzo, Valdevit
Azgın, Kıvanç
Self calibrating micro-fabricated load cells are disclosed. According to one embodiment, a self calibrating load cell comprises a resonant double ended tuning fork force sensor and a phase locked loop circuit for detection of frequency changes upon external load application to the resonant double ended tuning fork force sensor.

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Citation Formats
V. Lorenzo and K. Azgın, “Self calibrating micro-fabricated load cells,” 00, 2016.