A doppler direction finder processor.

Karavelioğlu, M Uğur


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This paper reports a 2(nd) order electromechanical sigma-delta accelerometer system. Accelerometer is fabricated using Dissolved Wafer Process, and has a structural thickness of 15 mu m. A large proof mass is used to decrease the mechanical noise of the accelerometer and 306 fingers per side are used to increase the sensitivity and operation range of the accelerometer. In order to obtain a high resolution, low noise accelerometer system, a fully differential, closed loop, oversampled sigma-delta capacitive ...
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Citation Formats
M. U. Karavelioğlu, “A doppler direction finder processor.,” Middle East Technical University, 1982.