Characterization and Enhancement of IR Optical and Tribological Properties of DLC Films Synthesized by RF-PECVD

Date

2017-11-26

Author

Taburoğlu, Vahit Eren
Yıldız, İlker
Özenbaş, Ahmet Macit

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https://hdl.handle.net/11511/76158

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Characterization and enhancement of IR optical and tribological properties of DLC films synthesized by RF-PECVD Taburoğlu, Vahit Eren; Özenbaş, Ahmet Macit; Akata Kurç, Burcu; Department of Micro and Nanotechnology (2017) This thesis analyzes the hydrogenated amorphous diamond like carbon (a-DLC) films coated on aluminum substrates by the technique of plasma enhanced chemical vapor deposition (PECVD). Effects of film thickness, hydrogen content and RF power on the tribology, optical characteristics and structure are observed and studied in detail. DLC films have compressive intrinsic stresses by default. Surface topography revealed by an interferometer shows that too low/high compressive stress is detrimental to the film. In...
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Citation Formats

V. E. Taburoğlu, İ. Yıldız, and A. M. Özenbaş, “Characterization and Enhancement of IR Optical and Tribological Properties of DLC Films Synthesized by RF-PECVD,” 2017, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/76158.