Experimental Heating Analysis of High Frequency RF CCP

Date

2015-12-04

Author

Erözbek Güngör, Ümmügül
Akbar, Demiral

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https://hdl.handle.net/11511/77414

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Citation Formats

Ü. Erözbek Güngör and D. Akbar, “Experimental Heating Analysis of High Frequency RF CCP,” 2015, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/77414.